Optical deflector
First Claim
1. An optical deflector comprising:
- a movable mirror;
a gimbal for rotatably supporting said movable mirror about a first rotational axis with a first support portion;
a frame for rotatably supporting said gimbal with a second support portion about a second rotational axis that forms an angle relative to the first rotational axis;
a moving comb electrode, said moving comb electrode being provided on said gimbal and having a surface extending approximately parallel to a direction of a rotational movement of said gimbal;
a stationary comb electrode, said stationary comb electrode being disposed facing the surface of said moving comb electrode;
an electrostatic driving unit for displacing said gimbal about the second rotational axis by an electrostatic force acting between said moving comb electrode and said stationary comb electrode; and
an electromagnetic driving unit for displacing said movable mirror about the first rotational axis by an electromagnetic force.
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Accused Products
Abstract
Optical deflector includes a movable mirror, a gimbal for rotatably supporting the movable mirror about a first rotational axis with a first support portion, and a frame for rotatably supporting the gimbal with a second support portion about a second rotational axis that forms an angle relative to the first rotational axis. A moving comb electrode is provided on the gimbal and has a surface extending approximately parallel to a direction of a rotational movement of the gimbal, and a stationary comb electrode is disposed facing the surface of the moving comb electrode. An electrostatic driving unit displaces the gimbal by an electrostatic force acting between the moving comb electrode and the stationary comb electrode. An electromagnetic driving unit displaces the movable mirror by an electromagnetic force.
35 Citations
15 Claims
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1. An optical deflector comprising:
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a movable mirror;
a gimbal for rotatably supporting said movable mirror about a first rotational axis with a first support portion;
a frame for rotatably supporting said gimbal with a second support portion about a second rotational axis that forms an angle relative to the first rotational axis;
a moving comb electrode, said moving comb electrode being provided on said gimbal and having a surface extending approximately parallel to a direction of a rotational movement of said gimbal;
a stationary comb electrode, said stationary comb electrode being disposed facing the surface of said moving comb electrode;
an electrostatic driving unit for displacing said gimbal about the second rotational axis by an electrostatic force acting between said moving comb electrode and said stationary comb electrode; and
an electromagnetic driving unit for displacing said movable mirror about the first rotational axis by an electromagnetic force. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification