Capacitance accelerometer having compensation electrode
First Claim
1. An accelerometer capable of compensating initial capacitances comprising:
- a horizontally movable floating mass;
support beams extended from a beam-fixing section to elastically support both ends of the mass;
movable electrodes extended outward from both sides of the mass to a predetermined length;
fixed electrodes extended from electrode-fixing sections to a predetermined length, and alternating with the movable electrodes with a predetermined gap; and
compensation electrode sections for displacing the mass in a moving direction of the mass to equalize an initial capacitance between the movable and fixed electrodes at one side with that between the movable and fixed electrodes at the other side.
1 Assignment
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Accused Products
Abstract
Disclosed is an accelerometer capable of compensating initial capacitance. In the accelerometer, support beams are extended from a beam-fixing section to elastically support both ends of a horizontally movable floating mass. Movable electrodes are extended outward from both sides of the mass to a predetermined length. Fixed electrodes are extended from electrode-fixing sections to a predetermined length, and alternate with the movable electrodes with a predetermined gap. Compensation electrode sections displace the mass in a moving direction of the mass to equalize an initial capacitance between the movable and fixed electrodes at one side with that between the movable and fixed electrodes at the other side. The invention can simply displace the mass compensation electrodes to equalize initial capacitances at the both ends.
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Citations
11 Claims
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1. An accelerometer capable of compensating initial capacitances comprising:
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a horizontally movable floating mass;
support beams extended from a beam-fixing section to elastically support both ends of the mass;
movable electrodes extended outward from both sides of the mass to a predetermined length;
fixed electrodes extended from electrode-fixing sections to a predetermined length, and alternating with the movable electrodes with a predetermined gap; and
compensation electrode sections for displacing the mass in a moving direction of the mass to equalize an initial capacitance between the movable and fixed electrodes at one side with that between the movable and fixed electrodes at the other side. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification