Magnetic layer processing
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Abstract
A dielectric layer is formed over a substrate comprising a semiconductor material. A magnetic layer is formed over the dielectric layer. The magnetic layer comprises an amorphous alloy comprising cobalt.
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Citations
46 Claims
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1-40. -40. (canceled)
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41. An inductor, comprising:
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a first dielectric layer formed over a semiconductor substrate, the first dielectric layer patterned to form a first row having alternating pedestals and trenches;
a second dielectric layer formed over the semiconductor substrate, the second dielectric layer patterned to form a second row having alternating pedestals and trenches that is adjacent to the first row;
a first magnetic layer formed over the first row and the second row, the first magnetic layer comprising an amorphous alloy which includes cobalt;
a fourth dielectric layer formed over the first magnetic layer and forming an interconnect portion connecting the first row to the second row;
a conductive layer formed conformally over the fourth dielectric layer to form a signal path along the first row, the interconnect portion, and the second row. - View Dependent Claims (42, 43, 44, 45, 46)
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Specification