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Characterization and compensation of errors in multi-axis interferometry systems

  • US 20050134862A1
  • Filed: 11/04/2004
  • Published: 06/23/2005
  • Est. Priority Date: 11/04/2003
  • Status: Active Grant
First Claim
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1. A method, comprising:

  • monitoring a position of a stage along a first measurement axis and a second measurement axis of a multi-axis interferometry system; and

    determining a position of the stage with respect to another degree of freedom based on the monitored positions along the first and second axes and predetermined information about how the measurement axes deviate from being parallel to one another.

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