Frequency tunable resonant scanner with auxiliary arms
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Abstract
A MEMs scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a flexible arm that extends from an oscillatory body. An electrical field applies a force to the flexible arm, thereby bending the flexible arm to change the moment of inertia of the oscillatory body and a secondary mass carried by the flexible arm. The shifted combined center of mass changes the resonant frequency of the MEMs device. In another embodiment, an absorptive material forms a portion of a torsional arm that supports the oscillatory body. The mechanical properties of the absorptive material can be varied by varying the concentration of a gas surrounding the absorptive material. The varied mechanical properties change the resonant frequency of the scanning device. A display apparatus includes the scanning device and the scanning device scans about two or more axes, typically in a raster pattern. Various approaches to controlling the frequency responses of the scanning device are described, including active control of MEMs scanners and passive frequency tuning.
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Citations
79 Claims
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1-33. -33. (canceled)
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34. A method for aberration compensation in a scanned beam system comprising:
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scanning a beam of light across a field of view; and
clocking pixels at times corresponding to an aberration map so as to compensate for aberrations in the system. - View Dependent Claims (35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 76, 77)
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53. A method for aberration compensation in a scanned beam system, comprising:
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scanning a beam of light across a field of view; and
clocking pixels having values corresponding to an aberration map so as to compensate for aberrations in the system. - View Dependent Claims (54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71)
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72. A scanned beam apparatus with compensation for aberration comprising:
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an electronic clock circuit operable to produce a series of first clock pulses;
a clock pattern memory operable to receive the series of first clock pulses and output a series of second clock pulses corresponding to the first clock pulses, the series of second clock pulses including at least one second clock pulse having an offset from the corresponding first clock pulse;
a light source driver circuit operable to receive the series of second clock pulses and output a modulation signal in synchronization with the series of second clock pulses;
a light source operable to receive the modulation signal from the light source driver circuit and to produce a modulated beam of light responsive to the modulation signal; and
a MEMS scanner aligned to receive the modulated beam of light and scan the modulated beam of light over a field of view. - View Dependent Claims (73, 74, 75, 78, 79)
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Specification