Unitary slot valve actuator with dual valves
First Claim
1. A dual slot valve for use in a semiconductor process cluster tool architecture arrangement, the dual slot valve comprising:
- a housing having a first side and a second side, the housing having a first slot at the first side and a second slot at the second side for passing a substrate between a first module and a second module, the first module being attached to the first side of the housing and the second module being attached to the second side of the housing;
a first door being movably mounted within the housing to enable closure of the first slot;
a second door being movably mounted within the housing to enable closure of the second slot;
one door actuator, the one door actuator being connected to each of the first and second doors; and
a mount configured to move the one door actuator with the first and second doors centered with respect to an axis, the mount moving the centered doors into a position between the first and second slots, the mount being further configured to cause the one door actuator to tip to a tipped orientation with respect to the axis so that in the tipped orientation either of the first and second doors closes a respective one of the first and second slots while the other of the first and second doors closes the respective other of the slots.
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Abstract
A unitary slot valve actuator is in a vacuum body between adjacent vacuum chambers, such as process and transport modules. Separate valves are provided on the unitary actuator for each of two valve slots, each slot being closed or opened according to the position of the unitary actuator. The separate valves allow a vacuum condition to be maintained in the transport module while an adjacent process module is open to the atmosphere for servicing. The unitary actuator allows access to an open valve for servicing the open valve by way of a centering mechanism that holds the valves in an open, but not vertically-spaced, position relative to the slots. The open valves are easily reached by a service worker. A separate motor moves the unitary actuator and the valves down from the open position and away from the slots to expose seal surfaces around the slots for cleaning.
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Citations
16 Claims
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1. A dual slot valve for use in a semiconductor process cluster tool architecture arrangement, the dual slot valve comprising:
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a housing having a first side and a second side, the housing having a first slot at the first side and a second slot at the second side for passing a substrate between a first module and a second module, the first module being attached to the first side of the housing and the second module being attached to the second side of the housing;
a first door being movably mounted within the housing to enable closure of the first slot;
a second door being movably mounted within the housing to enable closure of the second slot;
one door actuator, the one door actuator being connected to each of the first and second doors; and
a mount configured to move the one door actuator with the first and second doors centered with respect to an axis, the mount moving the centered doors into a position between the first and second slots, the mount being further configured to cause the one door actuator to tip to a tipped orientation with respect to the axis so that in the tipped orientation either of the first and second doors closes a respective one of the first and second slots while the other of the first and second doors closes the respective other of the slots. - View Dependent Claims (2, 3, 4, 5)
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6. A dual slot valve for use in a semiconductor process cluster tool architecture arrangement, the dual slot valve comprising:
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a housing having a first side and a second side, the housing having a first slot at the first side and a second slot at the second side for passing a substrate between a first module and a second module, the first module being attached to the first side of the housing and the second module being attached to the second side of the housing;
a first door mounted within the housing for movement in a direction of a first axis to enable closure of the first slot;
a second door mounted within the housing for movement in the direction of the first axis to enable closure of the second slot;
a common door actuator consisting of a single member, the single member mounting each of the first and second doors for the movement in the direction of the first axis, the common door actuator having a longitudinal axis;
a mount for moving the common door actuator with the longitudinal axis in an orientation perpendicular to the first axis so that the longitudinal axis and the doors are in a position centered between the first and second slots; and
a tipping drive effective when the doors reach the position centered between the first and second slots to move the mount and cause the common door actuator to tip so that the common door actuator moves either of the first and second doors to close a respective one of the slots while the other of the first and second doors opens the respective other one of the slots. - View Dependent Claims (7, 8, 9)
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10. A dual slot valve for use in a semiconductor process cluster tool architecture arrangement, the dual slot valve comprising:
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a housing having a first side and a second side, the housing having a first slot at the first side and a second slot at the second side for passing a substrate between a first module and a second module, the first module being attached to the first side of the housing and the second module being attached to the second side of the housing;
a first door movably mounted within the housing to enable closure of the first slot;
a second door movably mounted within the housing to enable closure of the second slot;
one common door actuator consisting of a single member, the single member being connected to each of the first and second doors;
a mount configured to support the one common door actuator for movement to move the first and second doors in the housing to position the first and second doors between the first and second slots, the mount being further configured to tip the one common door actuator with respect to a center axis;
a drive configured to cause the mount to move the one common door actuator so that the one common door actuator moves the first and second doors in the housing into respective positions between the first and second slots;
a centering mechanism configured to act on the mount to position the one common door actuator so as to center the first and second doors on the center axis between the first and second slots, the centering mechanism being effective as the one common door actuator moves the first and second doors in the housing into the position between the first and second slots; and
a tipping mechanism for tipping the mount so that the mount tips the one common door actuator with respect to the center axis, the tipping mechanism being configured to cause the tipping once the first and second doors have been positioned centered and between the first and second slots, the tipping mechanism being further configured to cause the one common door actuator to move one of the first and second doors toward one of the first and second slots to close the respective one slot and to move the other of the first and second doors to move away from the other of the first and second slots to open the respective other slot. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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Specification