Thin-film laminated body, thin-film cell, capacitor, and method and equipment for manufacturing thin-film laminated body
First Claim
1. A thin film layered product comprising at least two deposition units, each of which includes at least a first thin film layer and a second thin film layer, wherein at least one of the first thin film layer and the second thin film layer in each of the at least two deposition units has an area decreased in a direction from a lower layer toward an upper layer.
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Accused Products
Abstract
A thin film layered product is composed of at least two deposition units, each of which includes at least a first thin film layer and a second thin film layer. At least one of the first thin film layer and the second thin film layer in each of the at least two deposition units is laminated so as to have an area decreased in a direction from a lower layer toward an upper layer. Thus, the reliability of connection between layers can be improved, and when a protective layer is formed on side faces, the formability and adhesion strength can be improved.
55 Citations
17 Claims
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1. A thin film layered product comprising at least two deposition units, each of which includes at least a first thin film layer and a second thin film layer,
wherein at least one of the first thin film layer and the second thin film layer in each of the at least two deposition units has an area decreased in a direction from a lower layer toward an upper layer.
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7. A thin film battery comprising at least two deposition units, each of which includes at least a current collector layer, a positive active material layer, a solid electrolyte layer, and a negative active material layer,
wherein at least one of the current collector layer, the positive active material layer, the solid electrolyte layer, and the negative active material layer in each of the at least two deposition units has an area decreased in a direction from a lower layer toward an upper layer.
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8. A capacitor comprising at least two deposition units, each of which includes at least a dielectric layer and an electrode layer,
wherein at least one of the dielectric layer and the electrode layer in each of the at least two deposition units has an area decreased in a direction from a lower layer toward an upper layer.
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9. A method for manufacturing a thin film layered product comprising by taking as one unit:
- a step of laminating a first thin film layer patterned into a predetermined shape; and
a step of laminating a second thin film layer patterned into a predetermined shape, the unit of steps being performed repeatedly on a carrier, whereby the thin film layered product is manufactured that is composed of at least two deposition units, each of which includes at least the first thin film layer and the second thin film layer,wherein at least one of the first thin film layer and the second thin film layer in each of the at least two deposition units is laminated so as to have an area decreased with an increasing number of times the lamination is carried out. - View Dependent Claims (10, 11, 12, 13)
- a step of laminating a first thin film layer patterned into a predetermined shape; and
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14. An apparatus for manufacturing a thin film layered product, comprising:
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a rotating carrier;
a first thin film layer forming device that is opposed to the carrier and allows a material of a first thin film layer to be deposited on a surface of the carrier;
a second thin film layer forming device that is opposed to the carrier and allows a material of a second thin film layer to be deposited on the surface of the carrier; and
a patterning device that is opposed to the carrier and patterns each of the first thin film layer and the second thin film layer into a predetermined shape, wherein the patterning device performs patterning with respect to at least one of the first thin film layer and the second thin film layer so that the at least one of the first thin film layer and the second thin film layer has an area decreased with an increasing number of rotations of the carrier. - View Dependent Claims (15, 16, 17)
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Specification