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Amorphous carbon, amorphous-carbon coated member, and process for forming amorphous carbon film

  • US 20050142361A1
  • Filed: 12/03/2004
  • Published: 06/30/2005
  • Est. Priority Date: 12/04/2003
  • Status: Active Grant
First Claim
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1. Amorphous carbon, comprising:

  • carbon as a major component; and

    hydrogen in an amount of from more than 30 atomic % to 60 atomic % or less; and

    exhibiting an elastic modulus of from 40 or more to 150 GPa or less.

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