Controlling method for manufacturing process
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Abstract
In a method of controlling a manufacturing process, a Mahalanobis space of plural manufacturing control parameters is generated on the basis of first sampled data. Then, a Mahalanobis distance from the Mahalanobis space and second sampled data is calculated. A manufacturing process is determined to be under a malfunction operating condition by comparing the Mahalanobis distance and a threshold value.
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Citations
17 Claims
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1-12. -12. (canceled)
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13. A method of controlling a manufacturing process, comprising:
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monitoring operating conditions of plural process steps during the manufacturing process;
calculating a degree of risk for each of a malfunction operating condition step and subsequent steps, in accordance with selected data from plural manufacturing control parameters under a normal operating condition of the manufacturing process; and
determining correspondence priorities of process steps in response to the degree of risk for each of the malfunction operating condition step and subsequent steps. - View Dependent Claims (14, 15, 16, 17)
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Specification