User-friendly rule-based system and method for automatically generating photomask orders

• US 20050144088A1
• Filed: 11/03/2004
• Published: 06/30/2005
• Est. Priority Date: 07/30/2002
• Status: Active Grant

• Current Assignee: Phototronics Incorporated
• Original Assignee: Phototronics Incorporated
• Inventors: Baxter, Anthony, Cahalane, Daniel J., Croke, Charles E., Ridgway, Nicholas P.
• Granted Patent: US 7,640,529 B2
• Time in Patent Office: Days
• US Class Current: 705/26
• CPC Class Codes: G03F 1/68 Preparation processes not covered by groups G03F1/20 - G03F1/50
• CPC Class Codes: G03F 7/70425 Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
• CPC Class Codes: G03F 7/70433 Layout for increasing efficiency or for compensating imaging errors, e.g. layout of exposure fields for reducing focus errors; Use of mask features for increasing efficiency or for compensating imaging errors
• CPC Class Codes: G03F 7/70508 Data handling in all parts of the microlithographic apparatus, e.g. handling pattern data for addressable masks or data transfer to or from different components within the exposure apparatus
• CPC Class Codes: G06F 2111/04 Constraint-based CAD
• CPC Class Codes: G06F 30/00 Computer-aided design [CAD]
• CPC Class Codes: G06Q 30/02 Marketing; Price estimation or determination; Fundraising

Abstract

A system for generating photomask orders in a specified format includes at least one template or order for entry and storage of photomask order data, wherein the at least one template or order is created based upon requirements of a specified photomask order format. The system includes at least one set of rules corresponding to the at least one template or order, wherein the set of rules includes instructions which insure that a user enter complete information into the at least one template or order as required by the specified order format. The templates or order may be further comprised of components and/or subcomponents which can be stored separately. The data fields in the orders, templates, components, subcomponents, etc. may reference specification grades which can in turn be easily modified to update one or more orders, templates, components, subcomponents, etc. simultaneously. A graphical user interface may be associated with the at least one template or order, wherein the user can access the at least one template or order to enter photomask order data and create an order in a specified format. Alternatively, a command line generator may be used to allow a user to enter commands to generated and/or modify templates and orders. In one embodiment, preexisting data or information may be imported in the form of electronic information and be converted to populate data fields in an order, template, components and subcomponents, etc. A data processing mechanism may also be used to import electronic information from external media into the at least one template or order.

Claims

1. A system for generating photomask orders comprising:

at least one template or order for entry and storage of photomask order data, wherein said at least one template or order is created based upon requirements of a specified photomask order format;

a rule generator for creating at least one set of rules corresponding to said at least one template or order, wherein said at least one set of rules ensures that a user enter complete information into said at least one template or order as required by said specified photomask order format; and

a command line processor for receiving and executing one or more script commands to enter or modify said photomask order data in said at least one template or order.

2. The system of claim 1, wherein said system further comprise a data processing mechanism for importing electronic information from external media into said at least one template or order.

3. The system of claim 2, wherein said data-processing mechanism comprises instructions that map the data contained in said electronic information to a format usable for said system for generating photomask orders.

4. The system of claim 2, wherein said external media is located on a remote computer system.

5. The system of claim 2, wherein said external media is located on the same computer system as said command line processor.

6. The system of claim 2, wherein said electronic information comprises information selected from the group consisting of:

logistics suppliers, equipment suppliers, parts suppliers, photomask manufacturer, and transportation services.

7. The system of claim 1, wherein said system further comprises:

a message generator for alerting users of said system as to the status of an order being generated.

8. The system of claim 7, wherein said message generator generates a message in a form selected from the group consisting of:

an e-mail, a text message to be delivered over a communication network, and a log file.

9. The system of claim 1, wherein said command line processor is further capable of creating one or more new orders.

10. The system of claim 1, wherein said command line processor is further capable of creating one or more orders from said at least one template or order.

11. The system of claim 1, wherein said command line processor is further capable of adding components or subcomponents to said at least one template or order.

12. The system of claim 1, wherein said command line processor is further capable of creating SEMI P-10 files from said at least one template or order.

13. The system of claim 1, wherein said command line processor is further capable of making batch edits to a plurality of orders and templates simultaneously.

14. The system of claim 1, wherein said one or more script commands comprise a call to one or more functions stored in a system library.

15. A system for generating photomask orders comprising:

at least one template or order for entry and storage of photomask order data, wherein said at least one templates or order is created based upon requirements of a specified photomask order format, and wherein said at least one template or order is associated with one or more components and subcomponents, which can be stored separately from said at least one template or order; and

a rule generator for creating at least one set of rules corresponding to said at least one template or order, wherein said at least one set of rules ensures that a user enter complete information into said at least one template or order as required by said specified photomask order format.

16. The system of claim 15, further comprising a command line processor for receiving and executing one or more script commands to enter or modify said photomask order data in said at least one template or order.

17. The system of claim 16, wherein said command line processor is further capable of creating one or more new orders.

18. The system of claim 16, wherein said command line processor is further capable of creating one or more orders from said at least one template or order.

19. The system of claim 16, wherein said command line processor is further capable of adding new components or subcomponents to said at least one template or order.

20. The system of claim 16, wherein said command line processor is further capable of creating SEMI P-10 files from said at least one template or order.

21. The system of claim 16, wherein said command line processor is further capable of making batch edits to a plurality of orders and templates simultaneously.

22. The system of claim 16, wherein said one or more script commands comprise a call to one or more functions stored in a system library.

23. A system for generating photomask orders comprising:

at least one template or order for entry and storage of photomask order data, wherein said at least one templates or order is created based upon requirements of a specified photomask order format;

a rule generator for creating at least one set of rules corresponding to said at least one template or order, wherein said at least one set of rules ensures that a user enter complete information into said at least one template or order as required by said specified order format; and

at least one specification grades file for storing at least one reference data which is associated with said at least one template or order, wherein said at least one template or order comprises a reference to said at least one specification grades file.

24. The system of claim 23, wherein said at least one template or order is associated with one or more components and subcomponents, which can be stored separately from said at least one template or order.

25. The system of claim 23, further comprising a command line processor for receiving and executing one or more script commands to enter or modify said photomask order data in said at least one template or order.

26. The system of claim 25, wherein said command line processor is further capable of creating one or more new orders.

27. The system of claim 25, wherein said command line processor is further capable of creating one or more orders from said at least one template or order.

28. The system of claim 25, wherein said command line processor is further capable of adding new components or subcomponents to said at least one template or order.

29. The system of claim 25, wherein said command line processor is further capable of creating SEMI P-10 files from said at least one template or order.

30. The system of claim 25, wherein said command line processor is further capable of making batch edits to a plurality of orders and templates simultaneously.

31. The system of claim 25, wherein said one or more script commands comprise a call to one or more functions stored in a system library.

32. The system of claim 24, wherein said at least one reference data comprises at least one of said one or more components and subcomponents.

33. A method for generating a photomask order, comprising the steps of:

importing electronic information associated with said photomask order;

converting said electronic information into photomask order data to create at least one template or order; and

generating said photomask order based on said at least one template or order.

34. The method of claim 33, wherein said electronic information comprises a partial order in a SEMI P-10 file.

35. The method of claim 33, wherein said electronic information comprises a complete order in a SEMI P-10 file.

36. The method of claim 33, wherein said electronic information comprises a partial template or order in standard or proprietary format.

37. The method of claim 33, wherein said electronic information comprises a complete template or order in standard or proprietary format.

38. A method for generating a photomask order, comprising the steps of:

receiving at least one script command;

executing said at least one script command to create or modify at least one template or order; and

generating said photomask order based on said at least one order or template.

39. The method of claim 38, further comprising the step of executing said at least one script command to create one or more new orders.

40. The method of claim 38, further comprising the step of executing said at least one script command to create one or more orders from said at least one template or order.

41. The method of claim 38, further comprising the step of executing said at least one script command to add new components or subcomponents to said at least one template or order.

42. The method of claim 38, further comprising the step of executing said at least one script command to create SEMI P-10 files from said at least one template or order.

43. The method of claim 38, further comprising the step of executing said at least one script command to make batch edits to a plurality of orders and templates simultaneously.

44. The method of claim 38, wherein said at least one script command comprises a call to one or more functions stored in a system library.

45. The method of claim 38, further comprising the steps of:

importing electronic information associated with said photomask order; and

converting said electronic information into photomask order data to create said at least one template or order.

46. The method of claim 45, wherein said electronic information comprises a partial order in a SEMI P-10 file.

47. The method of claim 45, wherein said electronic information comprises a complete order in a SEMI P-10 file.

48. The method of claim 45, wherein said electronic information comprises a partial template or order in standard or proprietary format.

49. The method of claim 45, wherein said electronic information comprises a complete template or order in standard or proprietary format.

50. A system for generating a photomask order, comprising a computer readable medium capable of performing the steps of:

importing electronic information associated with said photomask order;

converting said electronic information into photomask order data to create at least one template or order; and

generating said photomask order based on said at least one template or order.

51. The system of claim 50, wherein said electronic information comprises a partial order in a SEMI P-10 file.

52. The system of claim 50, wherein said electronic information comprises a complete order in a SEMI P-10 file.

53. The system of claim 50, wherein said electronic information comprises a partial template or order in standard or proprietary format.

54. The system of claim 50, wherein said electronic information comprises a complete template or order in standard or proprietary format.

55. A system for generating a photomask order, comprising a computer readable medium capable of performing the steps of:

receiving at least one script command;

executing said at least one script command to create or modify at least one template or order; and

generating said photomask order based on said at least one order or template.

56. The system of claim 55, wherein said computer readable medium further capable of performing the step of executing said at least one script command to create one or more new orders.

57. The system of claim 55, wherein said computer readable medium further capable of performing the step of executing said at least one script command to create one or more orders from said at least one template or order.

58. The system of claim 55, wherein said computer readable medium further capable of performing the step of executing said at least one script command to add new components or subcomponents to said at least one template or order.

59. The system of claim 55, wherein said computer readable medium further capable of performing the step of executing said at least one script command to create SEMI P-10 files from said at least one template or order.

60. The system of claim 55, wherein said computer readable medium further capable of performing the step of executing said at least one script command to make batch edits to a plurality of orders and templates simultaneously.

61. The system of claim 55, wherein said at least one script command comprises a call to one or more functions stored in a system library.

62. The system of claim 55, wherein said computer readable medium further capable of performing the steps of:

importing electronic information associated with said photomask order; and

converting said electronic information into photomask order data to create said at least one template or order.

63. The system of claim 62, wherein said electronic information comprises a partial order in a SEMI P-10 file.

64. The system of claim 62, wherein said electronic information comprises a complete order in a SEMI P-10 file.

65. The system of claim 62, wherein said electronic information comprises a partial template or order in standard or proprietary format.

66. The system of claim 62, wherein said electronic information comprises a complete template or order in standard or proprietary format.