Coplanar proofmasses employable to sense acceleration along three axes
First Claim
Patent Images
1. An apparatus, comprising:
- a first proofmass employable to sense a first acceleration along a first input axis;
a second proofmass employable to sense a second acceleration along a second input axis; and
a third proofmass employable to sense a third acceleration along a third input axis;
wherein the first input axis, the second input axis, and the third input axis are substantially orthogonal;
wherein the first proofmass, the second proofmass, and the third proofmass are substantially coplanar.
4 Assignments
0 Petitions
Accused Products
Abstract
An apparatus in one example comprises a first proofmass employable to sense a first acceleration along a first input axis; a second proofmass employable to sense a second acceleration along a second input axis; and a third proofmass employable to sense a third acceleration along a third input axis. The first input axis, the second input axis, and the third input axis are substantially orthogonal. The first proofmass, the second proofmass, and the third proofmass are substantially coplanar.
24 Citations
21 Claims
-
1. An apparatus, comprising:
-
a first proofmass employable to sense a first acceleration along a first input axis;
a second proofmass employable to sense a second acceleration along a second input axis; and
a third proofmass employable to sense a third acceleration along a third input axis;
wherein the first input axis, the second input axis, and the third input axis are substantially orthogonal;
wherein the first proofmass, the second proofmass, and the third proofmass are substantially coplanar. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
-
12. A process, comprising the steps of:
-
etching three coplanar proofmasses into a substrate, wherein the three coplanar proofmasses are employable to sense acceleration along three respective input axes; and
etching one or more voids into the three coplanar proofmasses to orient the three respective input axes into three orthogonal acceleration sensing directions. - View Dependent Claims (13, 14, 15)
-
-
16. An apparatus, comprising:
-
a first proofmass employable to sense a first acceleration along a first input axis;
a second proofmass employable to sense a second acceleration along a second input axis; and
a third proofmass employable to sense a third acceleration along a third input axis;
wherein the first proofmass, the second proofmass, and the third proofmass are substantially coplanar;
wherein the first input axis, the second input axis, and the third input axis intersect at a common point and are substantially orthogonal. - View Dependent Claims (17, 18, 19, 20)
-
-
21. An apparatus, comprising:
-
a first proofmass employable to sense a first acceleration along a first input axis;
a second proofmass employable to sense a second acceleration along a second input axis;
a third proofmass employable to sense a third acceleration along a third input axis; and
a plurality of cross-leaf flexures that couple the first proofmass, the second proofmass, and the third proofmass with a frame;
wherein the first proofmass, the second proofmass, and the third proofmass are substantially coplanar.
-
Specification