Apparatus for and method of sensing a measured input

• US 20050145030A1
• Filed: 07/23/2004
• Published: 07/07/2005
• Est. Priority Date: 07/25/2003
• Status: Active Grant

• Current Assignee: Charles Stark Draper Laboratory Incorporated
• Original Assignee: Charles Stark Draper Laboratory Incorporated
• Inventors: Ward, Paul A., Elliott, Richard
• Granted Patent: US 7,055,387 B2
• Time in Patent Office: Days
• US Class Current: 73/514.180
• CPC Class Codes: G01D 5/24 by varying capacitance
• CPC Class Codes: G01D 5/2417 by varying separation
• CPC Class Codes: G01P 15/125 by capacitive pick-up

Abstract

Apparatus is used in sensing a measured input. The apparatus includes a capacitor with a capacitance that varies non-linearly in response to the measured input, and a circuitry that derives, from the capacitance, a signal that varies substantially linearly with the measured input. The capacitor includes a first electrode, a second electrode, and a gap defined by a space between the electrode. The circuitry includes an amplifier with a first input terminal in electrical communication with the first electrode, a second input terminal, and an output terminal in electrical communication with the second electrode. The capacitance of the capacitor varies as an inverse of the gap of the capacitor, the gap of the capacitor varies in response to changes in the measured input, and the signal is derived from an output of the amplifier.

Claims

1. Apparatus for use in sensing a measured input, comprising:

a capacitor having a capacitance that varies non-linearly in response to the measured input, the capacitor comprising a first electrode, a second electrode and a gap defined by a space between the electrodes; and

circuitry that derives, from the capacitance, a signal that varies substantially linearly with the measured input, the circuitry comprising an amplifier comprising a first input terminal being in electrical communication with the first electrode, a second input terminal, and an output terminal being in electrical communication with the second electrode;

wherein the capacitance of the capacitor varies as an inverse of the gap of the capacitor,

wherein the gap of the capacitor varies in response to changes in the measured input,

wherein the capacitor is a first capacitor,

wherein the circuitry is a first circuitry, and

wherein the signal is derived from an output of the amplifier.

2. The apparatus as claimed in claim 1 wherein the measured input is acceleration.

3. The apparatus as claimed in claim 1, further comprising:

a second capacitor having a capacitance that varies non-linearly in response to the measured input, the second capacitor comprising a first electrode, a second electrode and a gap defined by a space between the electrodes of the second capacitor; and

second circuitry that derives, from the capacitance of the second capacitor, a signal that varies substantially linearly with the measured input, the second circuitry comprising a second amplifier comprising a first input terminal being in electrical communication with the first electrode of the second capacitor, a second input terminal, and an output terminal being in electrical communication with the second electrode of the second capacitor;

wherein the capacitance of the second capacitor varies as an inverse of the gap of the second capacitor,

wherein the gap of the second capacitor varies in response to changes in the measured input, and

wherein the signal is derived from an output of the second amplifier.

4. The apparatus as claimed in claim 3, further comprising a first fixed capacitor comprising a first electrode in electrical communication with the first input terminal of the amplifier of the first circuitry, and a second electrode in electrical communication with a voltage input.

5. The apparatus as claimed in claim 3 wherein an output signal is derived by summing the signal derived by the first circuitry and the signal derived by the second circuitry.

6. The apparatus as claimed in claim 1 wherein the measured input is applied to a micro electro-mechanical system comprising the first capacitor.

7. The apparatus as claimed in claim 6 wherein the micro electro-mechanical system further comprises a, second capacitor.

8. The apparatus as claimed in claim 7 wherein the first capacitor and the second capacitor are fabricated on a substrate that is common to each.

9. The apparatus as claimed in claim 8 wherein a first sensor comprises the first capacitor and a second sensor comprises the second capacitor.

10. A method of generating a substantially linear signal in response to an input detected by a sensor, the sensor comprising a capacitance value that varies non-linearly in response to the input, the method comprising the steps of:

in response to a sensor input, varying a gap of a first sensing capacitor connected in a feedback circuit of a first amplifier;

in response to the sensor input, varying a gap of a second sensing capacitor connected in a feedback circuit of a second amplifier; and

generating a substantially linear signal comprising a sum of an output of the first amplifier and an output of the second amplifier,

wherein capacitance of the first capacitor varies as an inverse of the gap of the first sensing capacitor, and

wherein capacitance of the second capacitor varies as an inverse of the gap of the second sensing capacitor.

11. The method of claim 10 wherein the sensor input is acceleration.

12. The method of claim 11 wherein the substantially linear signal represents a sensor acceleration.

13. The method of claim 10 wherein the sensor comprises a micro electro-mechanical system.

14. The method of claim 13 wherein an accelerometer comprises the sensor.

15. The method of claim 10 wherein a first sensor comprises the first sensing capacitor and a second sensor comprises the second sensing capacitor.

16. The method of claim 10 wherein the first sensing capacitor and the second sensing capacitor are mechanically coupled and electrically isolated.

17. The method of claim 10, further comprising the steps of:

connecting a first fixed capacitor in series with a voltage input to the first amplifier; and

connecting a second fixed capacitor in series with a voltage input to the second amplifier.

18. The method of claim 17, further comprising the steps of:

establishing a capacitance value of the first fixed capacitor in order to substantially eliminate effects on the output of the first amplifier of differences in a capacitance value of the first sensing capacitor and a capacitance value of the second sensing capacitor when the input is zero.

19. A linear open loop micro electro-mechanical system comprising a capacitive pickoff, the system comprising:

a first amplifier comprising a first input terminal, a second input terminal, and an output terminal;

a second amplifier comprising a first input terminal, a second input terminal, and an output terminal;

a first capacitor comprising a moveable electrode and a fixed electrode;

a second capacitor comprising a moveable electrode and a fixed electrode;

a first proof mass comprising the movable electrode of first capacitor; and

a second proof mass mechanically coupled to the first proof mass, the second proof mass comprising the movable electrode of second capacitor,

wherein one of the moveable electrode and the fixed electrode of the first capacitor are in electrical communication with the output terminal of the first amplifier, and

wherein a substantially linear signal representative of a measured input is generated in response to changes in a capacitance of the first capacitor and changes in a capacitance of the second capacitor.

20. A method of improving linearity of an output signal generated in response to a non-linear capacitive input, the method comprising the steps of:

connecting a first variable capacitance responsive to a sensor input in a feedback circuit of a first amplifier;

connecting a second variable capacitance responsive to the sensor input in a feedback circuit of a second amplifier; and

generating an output signal by summing an output of the first amplifier and an output of the second amplifier.

21. Apparatus for use in sensing a measured input, comprising:

an amplifier having an output and an input, the output and input defining a feedback path between the output and the input;

a sensor in the feedback path, the sensor comprising a capacitor comprising a capacitance that varies non-linearly with the measured input; and

circuitry that derives, from the output of the amplifier, a signal that varies substantially linearly with the measured input.

22. The apparatus of claim 21, wherein the capacitance varies non-linearly with physical acceleration.

23. The apparatus of claim 21, wherein the amplifier has a feedforward path, and the apparatus further comprises a fixed capacitor in the feedforward path.