×

Stepping actuator and method of manufacture therefore

  • US 20050146241A1
  • Filed: 01/03/2005
  • Published: 07/07/2005
  • Est. Priority Date: 01/05/2004
  • Status: Active Grant
First Claim
Patent Images

1. A stepping actuator, comprising:

  • a suspended membrane comprising a plurality of movable electrodes connected in series by plurality of spring hinges to a payload platform; and

    anchors connecting said membrane to a substrate, said substrate comprising a plurality of fixed electrodes;

    wherein said movable electrodes of said suspended membrane;

    said fixed electrodes from said substrate form parallel-plate electrostatic sub-actuators; and

    said parallel-plate electrostatic sub-actuators have graduated air gaps.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×