Stepping actuator and method of manufacture therefore
First Claim
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1. A stepping actuator, comprising:
- a suspended membrane comprising a plurality of movable electrodes connected in series by plurality of spring hinges to a payload platform; and
anchors connecting said membrane to a substrate, said substrate comprising a plurality of fixed electrodes;
wherein said movable electrodes of said suspended membrane;
said fixed electrodes from said substrate form parallel-plate electrostatic sub-actuators; and
said parallel-plate electrostatic sub-actuators have graduated air gaps.
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Abstract
An embodiment of the present invention provides a stepping actuator, comprising a suspended membrane comprising a plurality of movable electrodes connected by plurality of spring hinges to a payload platform; and anchors connecting said membrane to a substrate, said substrate comprising a plurality of fixed electrodes; wherein said movable electrodes of said suspended membrane and said fixed electrodes from said substrate form parallel-plate electrostatic sub-actuators.
82 Citations
21 Claims
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1. A stepping actuator, comprising:
a suspended membrane comprising a plurality of movable electrodes connected in series by plurality of spring hinges to a payload platform; and
anchors connecting said membrane to a substrate, said substrate comprising a plurality of fixed electrodes;
wherein said movable electrodes of said suspended membrane;
said fixed electrodes from said substrate form parallel-plate electrostatic sub-actuators; and
said parallel-plate electrostatic sub-actuators have graduated air gaps.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 16, 17)
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12. A method of operating a stepping actuator, comprising
actuating a sub-actuator according to the following order: - the nth of said electrostatic sub-actuators from an anchor in said stepping actuator is actuated only after the first to the (n-1)th of electrostatic actuators in said stepping actuator are actuated, wherein said n is less than or equal to the number of said sub-actuators.
- View Dependent Claims (13, 14, 15)
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18. A method of manufacturing a stepping actuator, comprising:
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(a) providing a substrate wafer;
(b) forming electrodes with graduated heights on said substrate wafer;
(c) bonding a membrane wafer to said substrate wafer with an adhesive; and
(d) etching said membrane wafer to form a membrane of hinged electrodes and payload platform. - View Dependent Claims (19, 20, 21)
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Specification