Integrated inductor
First Claim
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1. An inductor comprising:
- a substrate comprising a semiconductor material;
a first dielectric layer over the substrate;
a first magnetic layer over the first dielectric layer;
a second dielectric layer over the magnetic layer;
a conductor over the second dielectric layer; and
a second magnetic layer over the conductor, the second magnetic layer is coupled to the first magnetic layer.
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Abstract
An inductor comprises a substrate comprising a semiconductor material, a first dielectric layer over the substrate, a magnetic layer over the first dielectric layer, a second dielectric layer over the magnetic layer, and a conductor over the second dielectric layer.
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Citations
19 Claims
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1. An inductor comprising:
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a substrate comprising a semiconductor material;
a first dielectric layer over the substrate;
a first magnetic layer over the first dielectric layer;
a second dielectric layer over the magnetic layer;
a conductor over the second dielectric layer; and
a second magnetic layer over the conductor, the second magnetic layer is coupled to the first magnetic layer. - View Dependent Claims (2, 3, 4, 8, 10, 11)
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5-7. -7. (canceled)
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9. (canceled)
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12. An inductor comprising:
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a substrate comprising a semiconductor material;
a first dielectric layer over the substrate;
a conductor over the first dielectric layer;
a second dielectric layer over the conductor; and
a magnetic layer over the second dielectric layer, wherein the magnetic layer comprises cobalt. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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19-37. -37. (canceled)
Specification