Angular rate sensor
First Claim
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1. An angular rate sensor comprising:
- a quadratic prism-like oscillator formed by laminating a substrate and piezoelectric material, the piezoelectric material being made of piezoelectric ceramics including PZT (Lead Zirconate Titanate) as a main component, and the substrate being made of a material other than PZT, having physical property values equivalent to or less than PZT, which is a main component of the piezoelectric ceramics, with respect to Young'"'"'s modulus and thermal expansion coefficient.
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Abstract
An angular rate sensor includes a quadratic prism-like oscillator 1a formed by laminating a substrate 2 and a piezoelectric material 3, the piezoelectric material 3 is made of piezoelectric ceramics including PZT (Lead Zirconate Titanate) as a main component, and the substrate 2 is made of a material other than PZT having physical property values equivalent to or less than PZT, which is a main component of the piezoelectric ceramics, with respect to Young'"'"'s modulus, thermal expansion coefficient, and the like.
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6 Claims
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1. An angular rate sensor comprising:
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a quadratic prism-like oscillator formed by laminating a substrate and piezoelectric material, the piezoelectric material being made of piezoelectric ceramics including PZT (Lead Zirconate Titanate) as a main component, and the substrate being made of a material other than PZT, having physical property values equivalent to or less than PZT, which is a main component of the piezoelectric ceramics, with respect to Young'"'"'s modulus and thermal expansion coefficient. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification