Material deposition system and a method for coating a substrate or thermally processing a material in a vacuum

• US 20050147753A1
• Filed: 12/10/2004
• Published: 07/07/2005
• Est. Priority Date: 10/22/1999
• Status: Abandoned Application

• Current Assignee: Kurt J. Lesker Company
• Original Assignee: Kurt J. Lesker Company
• Inventors: Smith, Gary L.
• Application Number:
  US11/009,957
• Publication Number:
  US 20050147753A1
• Time in Patent Office: Days
• US Class Current: 427/249.100
• CPC Class Codes: C23C 14/12 Organic material
• CPC Class Codes: C23C 14/243 Crucibles for source material C23C14/28, C23C14/30 take precedence

Abstract

Disclosed is a material deposition system for depositing material onto a surface of a substrate. The system includes a first body element with an interior cavity and an exit aperture extending through the first body element, and a second body element having an interior cavity and an exit aperture extending through the second body element. The interior cavity of the second body element contains the material, and the exit aperture of the second body element is spacially separated from and in fluid communication with the exit aperture of the first body element. The first body element and the second body element are rotatable, such that the exit apertures of the first body element and the second body element can be aligned and misaligned. A material deposition system with novel aperture spacing and separation and methods of coating a substrate and thermally processing a deposition material are also disclosed.

Claims

1. A material deposition system for depositing material onto a surface of a substrate, the system comprising:

a first body element having an interior cavity and at least one exit aperture extending through the first body element;

at least one second body element having an interior cavity and at least one exit aperture extending through the at least one second body element, the interior cavity of the at least one second body element configured to contain the material, wherein the at least one exit aperture of the at least one second body element is spatially separated from and in fluid communication with the at least one exit aperture of the first body element;

wherein at least one of the first body element and the at least one second body element are rotatable with respect to each other, such that the at least one exit aperture of the first body element and the at least one exit aperture of the second body element can be aligned and misaligned with respect to each other.

2. A material deposition system for depositing material onto a surface of a substrate, the system comprising:

at least one body element having an internal cavity configured to contain a material, a wall with a wall thickness and a substantially enclosed upper surface; and

a plurality of apertures extending through the upper surface of the at least one body element and forming a pattern along the upper surface, wherein the exit apertures have an open dimension (D) and a separation spacing (P), wherein the open dimension (D) and the separation spacing (P) are one of fixed and variable dimensions;

wherein the plurality of exit apertures have an open dimension (D) in the range of about ⅕ and

about 5 times the wall thickness of the at least one body element;

wherein the plurality of exit apertures have a separation spacing (P) in the range of about 1.0 and about 20 times the open dimension (D) of the at least one body element.

3. The system of claim 2, wherein the at least one body element further comprises an access port for providing access to the inner cavity of the body element for inserting the material therein.

4. The system of claim 2, wherein the access port is positioned on an axial end of the at least one body element, the access port removably attachable to the axial end thereof.

5. The system of claim 2, further comprising a support fixture attached to at least one of an access port, an axial end of the at least one body element and the longitudinal surface of the at least one body element, the support fixture configured to provide at least one of reduced thermal conductance and separation of the at least one body element from further components of the material deposition system.

6. The system of claim 2, wherein the open dimension (D) of the plurality of exit apertures is in the range of about 0.03 cm and about 0.15 cm.

7. The system of claim 2, wherein the plurality of exit apertures have a total open hole area of less than about 1.0 cm² per 35.0 cm of body element length.

8. The system of claim 2, wherein a portion of the plurality of exit apertures include an open dimension (D) less than the wall thickness of the at least one body element.

9. The system of claim 2, further comprising a heating element configured to at least one of directly and indirectly heat the material contained in the at least one body element.

10. The system of claim 9, further comprising a temperature sensing probe in communication with the at least one body element and configured to sense the temperature of at least one of the body element and the material contained in the at least body element.

11. The system of claim 9, further comprising a process control apparatus in communication with at least one of the heating element, a temperature sensing probe and the at least one body element, wherein the process control apparatus provide temperature control of at least one of the body element and the material contained in the at least one body element.

12. The system of claim 2, wherein the plurality of exit apertures are at least one a variably spaced and variably sized with respect to each other.

13. The system of claim 2, wherein the plurality of exit apertures are positioned in order to provide a desired emission flux pattern and a desired coating profile on the substrate.

14. The system of claim 2, further comprising an emission sensing device configured to sense emission of material through the plurality of exit apertures, such that the rate of material volatilization from the at least one body element is determined.

15. The system of claim 2, further comprising a deposition sensing device configured to sense the deposition of material on the substrate, such that the rate of material volatilization from the at least one body element is determined.

16. The system of claim 2, wherein the at least one body element is at least one of rotatable and repositionable within the material deposition system.

17. A method of coating a substrate in a deposition material system having a crucible with a plurality of exit apertures extending therethrough, a deposition source structure and a vacuum system, the method comprising the steps of:

(a) positioning at least one of the deposition source structure and the crucible within the vacuum system;

(b) positioning at least one deposition chemistry element within the crucible;

(c) positioning at least one substrate in fluid communication with the deposition chemistry element;

(d) heating the deposition chemistry element to volatilize the deposition chemistry element and emit material;

(e) exposing at least a portion of the at least one substrate to material emitted from the heated deposition chemistry element through a plurality of exit apertures in operational communication with at least one of the deposition source structure and the crucible; and

(f) removing the crucible from the deposition source structure and vacuum system through at least one openable end of the deposition source structure.

18. The method of claim 17, further comprising the step of reintroducing the crucible into the deposition source structure and the vacuum system through the openable end of the deposition source structure, wherein the crucible contains at least one of deposition chemistry, an additional deposition chemistry element, a different deposition chemistry element and a further productive coating material element.

19. The method of claim 18, further comprising the steps of:

heating the at least one of the deposition chemistry, the additional deposition chemistry element, the different deposition chemistry element and the further productive coating material element to volatilize the deposition chemistry, the additional deposition chemistry element, the different deposition chemistry element and the further productive coating material element and emit material; and

exposing at least a portion of the at least one substrate to material emitted from the deposition chemistry, the additional deposition chemistry element, the different deposition chemistry element and the further productive coating element through the plurality of exit apertures.

20. The method of claim 17, further comprising the step of providing relative motion between emitted material and the at least one substrate, thereby providing a desired coating uniformity.

21. A method of thermally processing a deposition material in a crucible and a deposition source structure in a vacuum system, the method comprising the steps of:

(a) positioning at least one of the deposition source structure and the crucible within the vacuum system;

(b) positioning deposition material to be thermally processed in the crucible through an openable end of the deposition source structure and the crucible;

(c) heating the deposition material in a thermal processing procedure to at least one of process, clean, de-gas and fractionally distill the deposition material; and

(d) removing at least one of the deposition source structure and crucible from the vacuum system.

22. The method of claim 21, further comprising the steps of:

removing at least one of the deposition source structure and the crucible from the vacuum system; and

subsequently reintroducing the at least one of the deposition source structure and the crucible to the vacuum system, wherein the at least one of the deposition source structure and the crucible contains at least one of deposition chemistry, additional deposition material, different deposition material element and a further productive deposition material.

23. The method of claim 22, further comprising the step of heating the deposition chemistry, the additional deposition material, the different deposition material and the further productive coating material in a thermal processing procedure to at least one of process, clean, de-gas and fractionally distill the additional deposition material, the different deposition material element and the further productive deposition material.

24. A crucible for use in a material deposition system for depositing material onto a surface of a substrate, the crucible comprising:

at least one body element having an internal cavity configured to contain a material, a wall with a wall thickness and a substantially enclosed upper surface; and

a plurality of apertures extending through the upper surface of the at least one body element and forming a pattern along the upper surface, wherein the exit apertures have an open dimension (D) and a separation spacing (P), wherein the open dimension (D) and the separation spacing (P) are one of fixed and variable dimensions;

wherein the plurality of exit apertures have an open dimension (D) in the range of about ⅕ and

about 5 times the wall thickness of the at least one body element;

wherein the plurality of exit apertures have a separation spacing (P) in the range of about 1.0 and about 20 times the open dimension (D) of the at least one body element.