Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the same
First Claim
Patent Images
1. An electrostatic chuck, comprising:
- a dielectric ceramic layer made of an alumina sintered body having a volume resistivity equal to or greater than about 1×
1017Ω
·
cm at room temperature and a volume resistivity equal to or greater than about 1×
1014Ω
·
cm at 300°
C.; and
an electrode formed on one surface of the dielectric ceramic layer.
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Abstract
An electrostatic chuck comprises a dielectric ceramic layer made of an alumina sintered body having a volume resistivity equal to or greater than about 1×1017Ω·cm at room temperature and a volume resistivity equal to or greater than about 1×1014Ω·cm at 300° C., and an electrode formed on one surface of the dielectric ceramic layer.
70 Citations
23 Claims
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1. An electrostatic chuck, comprising:
-
a dielectric ceramic layer made of an alumina sintered body having a volume resistivity equal to or greater than about 1×
1017Ω
·
cm at room temperature and a volume resistivity equal to or greater than about 1×
1014Ω
·
cm at 300°
C.; and
an electrode formed on one surface of the dielectric ceramic layer. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. An electrostatic chuck, comprising:
-
a dielectric ceramic layer made of an alumina sintered body having a volume resistivity equal to or greater than about 1×
1017Ω
·
cm at room temperature and a volume resistivity equal to or greater than about 1×
1015Ω
·
cm at 200°
C.; and
an electrode formed on one surface of the dielectric ceramic layer. - View Dependent Claims (9, 10, 11, 12, 13)
-
-
14. A manufacturing method for an electrostatic chuck, comprising:
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forming an alumina sintered body by sintering with ceramic raw material powder including at least about 99.5% by weight alumina in an inert atmosphere or a reduction atmosphere by hot press method; and
forming an electrode.
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15. An alumina sintered member having a volume resistivity equal to or greater than about 1×
- 1017Ω
·
cm at room temperature and a volume resistivity equal to or greater than about 1×
1014Ω
·
cm at 300°
C. - View Dependent Claims (16, 17, 18)
- 1017Ω
-
19. An alumina sintered member having a volume resistivity equal to or greater than about 1×
- 1017Ω
·
cm at room temperature and a volume resistivity equal to or greater than about 1×
1015Ω
·
cm at 200°
C. - View Dependent Claims (20, 21)
- 1017Ω
-
22. A manufacturing method for an alumina sintered member, comprising:
forming an alumina sintered member having a volume resistivity equal to or greater than about 1×
1017Ω
·
cm at room temperature and a volume resistivity equal to or greater than about 1×
1014Ω
·
cm at 300°
C. by sintering with ceramic raw material powder including at least about 99.5% by weight alumina in an inert atmosphere or a reduction atmosphere by hot press method.
-
23. A manufacturing method for an alumina sintered member, comprising:
forming an alumina sintered member having a volume resistivity equal to or greater than about 1×
1017Ω
·
cm at room temperature and a volume resistivity equal to or greater than about 1×
1015Ω
·
cm at 200°
C. by sintering with ceramic raw material powder including at least about 99.5% by weight alumina in an inert atmosphere or a reduction atmosphere by hot press method.
Specification