Pressure sensor, method of fabricating the same, and method of calibrating the same
First Claim
1. A pressure sensor having a digital output, the pressure sensor comprising:
- a substrate formed with a plurality of channels; and
a gating part disposed on the substrate so that an area of the gating part facing which confronts the channels is spaced apart from the substrate and movable in response to an external pressure to cause the channels to become selectively conductive.
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Accused Products
Abstract
A pressure sensor having a digital output includes a substrate formed with plural channels, and a gating part formed in such a way that an area confronting with the plural channels is spaced from the substrate and moved in response to an external pressure, thereby making the plural channels selectively conductive. Such a pressure sensor can obtain binary information of each channel from the fact that which is made to be conductive among the plural channels is determined by the movement of the area formed in the gating part to confront with the plural channels, and it is possible to measure a pressure within a set range from binary information of each of the plural channels. As a result, because a peripheral circuit of the pressure sensor can be simplified, the manufacturing costs and power consumption can be greatly reduced.
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Citations
19 Claims
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1. A pressure sensor having a digital output, the pressure sensor comprising:
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a substrate formed with a plurality of channels; and
a gating part disposed on the substrate so that an area of the gating part facing which confronts the channels is spaced apart from the substrate and movable in response to an external pressure to cause the channels to become selectively conductive. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of fabricating a pressure sensor having a digital output, the method comprising:
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etching a first side of a first semiconductor substrate at a predetermined area and depositing impurities forming a flat plate along the first side of the first semiconductor substrate which has been etched at the predetermined area;
forming a plurality of channels in a side of a second semiconductor substrate in an area which corresponds to the predetermined area of the first semiconductor substrate which has been etched and depositing an insulation layer on the side of the second semiconductor substrate in which the plural channels are formed;
disposing the first semiconductor substrate on the insulation layer so that the first side of the semiconductor substrate contacts the insulation layer; and
etching a second side of the first semiconductor substrate to expose the flat plate. - View Dependent Claims (8, 9, 10, 11)
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12. A method of fabricating a pressure sensor having a digital output, the method comprising:
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etching a first side of a first semiconductor substrate at a predetermined area and depositing impurities for forming a flat plate along the first side of the first semiconductor substrate which has been etched at the predetermined area;
disposing the first side of the first semiconductor substrate on a second semiconductor substrate;
etching a second side of the first semiconductor substrate to expose the flat plate;
forming a plurality of channels in a third semiconductor substrate in an area which corresponds to the predetermined area of the first semiconductor substrate which has been etched; and
disposing the third semiconductor substrate on the first semiconductor so that the area of the third semiconductor substrate in which the channels are formed is aligned with the flat plate of the first semiconductor. - View Dependent Claims (13, 14, 15, 16)
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17. A method of calibrating a pressure sensor having a digital output, the method comprising:
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setting an intensity of pressure according to an output signal from each of a plurality of channels formed in a semiconductor substrate;
detecting which of the channels is made conductive according to a movement of a flat plate, wherein the flat plate determines which of the channels is made conductive in response to an external pressure;
estimating, as binary information, an output signal depending on which of the channels is made conductive; and
calculating the external pressure on the basis of the binary information and the intensity of pressure. - View Dependent Claims (18, 19)
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Specification