Proportional micromechanical valve

• US 20050156129A1
• Filed: 03/07/2005
• Published: 07/21/2005
• Est. Priority Date: 09/03/1998
• Status: Active Grant

• Current Assignee: Amphenol Thermometrics, Inc. (Amphenol Corporation), Kelsey-Hayes Co. (Zeppelin - Stiftung der Stadt Friedrichshafen)
• Original Assignee: General Electric Company, Kelsey-Hayes Co. (Zeppelin - Stiftung der Stadt Friedrichshafen)
• Inventors: Barron, Richard J., Fuller, Edward Nelson, Van Drieenhuizen, Bert P., Maluf, Nadim I., Williams, Kirt R.
• Granted Patent: US 7,367,359 B2
• Time in Patent Office: Days
• US Class Current: 251/129.10
• CPC Class Codes: B81B 3/0024 Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators electric motors using thermal effects H02N10/00
• CPC Class Codes: F15C 5/00 Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
• CPC Class Codes: F16K 2099/0074 using photolithography, e.g. etching
• CPC Class Codes: F16K 2099/008 Multi-layer fabrications
• CPC Class Codes: F16K 2099/0098 Refrigeration circuits, e.g. for cooling integrated circuits
• CPC Class Codes: F16K 99/0001 Microvalves microdevices B81B1/00; manufacture or treatment of devices or systems in or on a substrate B81C1/00; microfluidic structures B01L3/5027; micropumps F04B19/006
• CPC Class Codes: F16K 99/0011 Gate valves or sliding valves
• CPC Class Codes: F16K 99/0013 Rotary valves
• CPC Class Codes: F16K 99/0034 Operating means specially adapted for microvalves
• CPC Class Codes: F16K 99/0044 using thermo-electric means
• CPC Class Codes: Y10T 137/0396 Involving pressure control
• CPC Class Codes: Y10T 137/2213 Electrically-actuated element [e.g., electro-mechanical transducer]
• CPC Class Codes: Y10T 137/2224 Structure of body of device
• CPC Class Codes: Y10T 137/8242 Electrical

Abstract

The present invention provides a proportional microvalve having a first, second and third layer, and having high aspect ratio geometries. The first layer defines a cavity with inlet and outlet ports. The second layer, doped to have a low resistivity and bonded between the first and third layers, defines a cavity having a flow area to permit fluid flow between the inlet and outlet ports. The second layer further defines an actuatable displaceable member, and one or more thermal actuators for actuating the displaceable member to a position between and including an open and a closed position to permit or occlude fluid flow. The third layer provides one wall of the cavity and provides electrical contacts for electrically heating the thermally expandable actuators. The thermal actuators and the displaceable member have high aspect ratios and are formed by deep reactive ion etching such that they are displaceable in the plane of the second layer while being very stiff out of the plane. Thus, both actuation and displacement of the displaceable member are in the plane of the layer.

Claims

1-80. -80. (canceled)

81. A microvalve comprising:

a first layer, a second layer defining a flow area, and a third layer, the second layer disposed between the first layer and the third layer,

the first layer defines a first port there through and at least one of the first layer and the third layer defines a second port there through to permit fluid flow from the first port to the second port through the flow area defined in the second layer,

a first member defined by the second layer;

a displaceable structure attached to the first member and including a first end and a second end; and

a first actuator defined by the second layer and operatively coupled to the displaceable structure to displace the second end of the displaceable structure in a plane parallel to the second layer between an open state and a closed state relative to one of the first and second ports.

82. The microvalve of claim 81 further including:

a second member defined by the second layer and attached to the displaceable structure; and

a second actuator defined by the second layer and operatively coupled to the displaceable structure through the second member.

83. The microvalve of claim 82 wherein the first actuator is operatively coupled to the displaceable structure through the first member.

84. The microvalve of claim 83 further including first electrical contacts formed through the third layer and coupled to the first actuator to provide a first electrical control signal thereto and second electrical contacts formed through the third layer and coupled to the second actuator for providing a second electrical control signal to the second actuator.

85. The microvalve of claim 81 wherein the second end of the displaceable structure includes an extension which at least partially surrounds the second port, the extension further defining the flow area defined by the second layer.

86. The microvalve of claim 85 wherein the extension completely surrounds the second port.

87. The microvalve of claim 81 including a sensor operatively coupled to the displaceable structure and for sensing displacement thereof.

88. The microvalve of claim 81 wherein the second end of the displaceable structure includes an extension which surrounds only the first port, the extension further defining the flow area defined by the second layer.

89. The microvalve of claim 81 wherein a width of the displaceable structure increases from the first end to the second end thereof.

90. The microvalve of claim 81 wherein a width of the displaceable structure is smaller at a second end thereof that at a first end thereof.

91. The microvalve of claim 81 wherein a width of the displaceable structure decreases from the first end to the second end thereof.

92. The microvalve of claim 91, wherein the first actuator is disposed outside of the flow area.

93. The microvalve of claim 81, wherein the first actuator is formed by deep reactive ion etching.

94. The microvalve of claim 93, wherein the displaceable structure is formed by deep reactive ion etching.

95. The microvalve of claim 81 wherein the second layer includes highly doped single-crystal silicon.

96. The microvalve of claim 81 wherein the displaceable structure has a length and wherein the actuator is secured to the displaceable structure at a location along the length of the displaceable structure.

97. A microvalve comprising:

a first layer, a second layer and a third layer, the second layer disposed between the first and third layers,

the first layer defines a first port there through and at least one of the first and third layers defines a second port there through to permit fluid flow from the first port to the second port through a flow area defined in the second layer,

a first member suspended within a cavity region defined by the second layer and including a proximal end and a distal end, the proximal end of the first member integrally secured to the second layer;

a second member suspended within a cavity region defined by the second layer and including a proximal end and a distal end, the proximal end of the second member integrally secured to the second layer;

a displaceable structure suspended within the cavity region and including a first end and a second end, the displaceable structure integrally secured to the distal end of the first suspended member and to the distal end of the second suspended member; and

a first actuator unitarily formed in the second layer and operatively coupled to the first suspended member so as to displace the second end of the displaceable structure in a plane defined by the second layer and at a position between an open state and a closed state relative to one of the first and second ports; and

first electrical contacts formed through the third layer and coupled to the first actuator to provide a first electrical control signal thereto.

98. The microvalve of claim 97 further including a second actuator defined by the second layer and operatively coupled to the displaceable structure through the second member.

99. The microvalve of claim 98 wherein the first actuator is operatively coupled to the displaceable structure through the first member.

100. The microvalve of claim 97 wherein the first and second members are secured on opposed sides of the displaceable structure.

101. The microvalve of claim 97 wherein the second end of the displaceable structure includes an extension which at least partially surrounds the second port, the extension further defining the flow area defined by the second layer.

102. The microvalve of claim 101 wherein the extension completely surrounds the second port.

103. The microvalve of claim 97 wherein the second end of the displaceable structure includes an extension which at least partially surrounds the first port.

104. The microvalve of claim 97 wherein a width of the displaceable structure increases from the first end to the second end thereof.

105. The microvalve of claim 104 wherein the width of the displaceable structure is greater at the first end thereof than the second end thereof.

106. The microvalve of claim 97 wherein the first actuator is formed by deep reactive ion etching.

107. The microvalve of claim 106 wherein the displaceable structure is formed by deep reactive ion etching.

108. The microvalve of claim 97 wherein the second layer includes highly doped single-crystal silicon.

109. A microvalve, comprising:

a first layer, a second layer defining a flow area, and a third layer, the second layer disposed between the first layer and the third layer,

the first layer defining a first port there through and at least one of the first and the third layers defining a second port there through to permit fluid flow from the first port to the second port through a flow area defined by the second layer,

the second layer defines a displaceable structure and at least one actuator disposed relative to a first end of the displaceable structure to move the displaceable structure in a plane parallel to the second layer, the displaceable structure movable to place a second end portion thereof at a position between an open and a closed position relative to one of the first and the second ports; and

an extension at the second end of the displaceable structure which at least partially surrounds the second port, the extension further defining the flow area defined by the second layer.

110. The microvalve of claim 109 wherein the extension completely surrounds the second port.

111. A micromechanical device, comprising:

a first layer,

a second layer defining a cavity, and

a third layer, the second layer being disposed between the first layer and the third layer;

at least one of a displaceable valve structure and an actuator disposed in the cavity defined by the second layer, and

a member disposed in the cavity and fixed to the first layer and the third layer.

112. The micromechanical device of claim 111 wherein the member is disposed in the cavity adjacent the displaceable valve structure.

113. The micromechanical device of claim 111 wherein the first layer defines a first port there through and at least one of the first and third layers defines a second port through the chamber defined by the second layer, and the member is a flow director fixed adjacent the second port.

114. A microvalve comprising:

a valve body;

a movable valve member; and

a hinge for mounting said movable valve member in said valve body, said hinge comprising an elongate flexure beam connecting said valve member to said valve body whereby said flexure beam is adapted to bend as said valve member moves relative to said valve body.

115. The microvalve defined in claim 114, wherein said valve member is longitudinally elongate and said hinge forms a reduced-width generally longitudinally extending extension of said valve member.

116. The microvalve defined in claim 114, wherein said valve member moves in a plane and defines a first transverse width in said plane and said flexure beam of said hinge defines a second transverse width in said plane which is less than said first transverse width.

117. The microvalve defined in claim 116, wherein said flexure beam of said hinge defines a divergent root at an end thereof.

118. The microvalve defined in claim 116, further including an actuator for selectively moving said valve member relative to said valve body, said actuator having a connecting member operatively coupling said valve member and said actuator, said connecting member comprising an elongate flexure beam defining a third transverse width in said plane which is less than said first transverse width

119. The microvalve defined in claim 114, wherein said valve member is longitudinally elongate and defines a longitudinal axis and defines a transverse width of said valve member, and wherein said hinge extends at an angle to said longitudinal axis and defines a transverse width of said hinge which is less than said transverse width of said valve member.

120. The microvalve defined in claim 119, further including an actuator for selectively moving said valve member relative to said valve body, said actuator having a connecting member operatively coupling said valve member and said actuator, said connecting member comprising an elongate flexure beam defining a transverse width of said connecting member which is less than said transverse width of said valve member.

121. The microvalve defined in claim 120 wherein said connecting member extends generally parallel to said flexure beam of said hinge.