Light emitting device and method of manufacturing the same
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Accused Products
Abstract
A light emitting device is provided which has a structure for preventing degradation of a light emitting element due to water and oxygen contained in an interlayer insulating film formed between a TFT and the light emitting element. A TFT is formed on a substrate, an inorganic insulating film is formed on the TFT from an inorganic material and serves as a first insulating film, an organic insulating film is formed on the first insulating film from an organic material and serves as a second insulating film, and an inorganic insulating film is formed on the second insulating film from an inorganic material and serves as a third insulating film. Thus obtained is a structure for preventing the second insulating film from releasing moisture and oxygen. In order to avoid defect in forming the film, a portion of the third insulating film where a contact hole is formed is removed alone. Then, a light emitting element composed of an anode, an organic compound layer, and a cathode is formed on the third insulating film. A TFT and a light emitting element in a light emitting device of this application are connected to each other through a wire formed in a contact hole.
44 Citations
20 Claims
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1-8. -8. (canceled)
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9. A method of manufacturing a light emitting device, comprising:
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forming a thin film transistor on an insulating surface;
forming a first insulating film comprising an inorganic material over the thin film transistor;
forming a second insulating film comprising an organic material over the first insulating film by application;
forming a third insulating film comprising an inorganic material over the second insulating film by sputtering;
forming a conducting film over the third insulating film, the conductive film serving as a first electrode of a light emitting element;
forming the first electrode from the conductive film by first etching using a mask;
pattering the third insulating film by second etching to form a patterned third insulating film, thereby exposing portion of the second insulating film;
forming a contact hole in the first insulating film, the second insulating film, and a gate insulating film of the thin film transistor wherein the contact hole is located in the exposed portion of the second insulating film;
forming a wire in the contact hole wherein the wire is brought into contact with the thin film transistor and the first electrode;
forming an organic compound layer over the first electrode; and
forming a second electrode of the light emitting element over the organic compound layer. - View Dependent Claims (12, 15, 18)
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10. A method of manufacturing a light emitting device, comprising:
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forming a thin film transistor on an insulating surface;
forming a first insulating film comprising an inorganic material over the thin film transistor;
forming a second insulating film comprising an organic material over the first insulating film by application;
forming a third insulating film comprising an inorganic material over the second insulating film by sputtering;
forming a conducting film over the third insulating film, the conductive film serving as a first electrode of a light emitting element;
forming the first electrode from the conductive film by wet etching using a mask; and
pattering the third insulating film by dry etching to form a patterned third insulating film, thereby exposing portion of the second insulating film. - View Dependent Claims (13, 16, 19)
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11. A method of manufacturing a light emitting device, comprising:
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forming a thin film transistor on an insulating surface;
forming a first insulating film comprising an inorganic material over the thin film transistor;
forming a second insulating film comprising an organic material over the first insulating film by application;
forming a third insulating film comprising an inorganic material over the second insulating film by sputtering;
forming a conducting film over the third insulating film, the conductive film serving as a first electrode of a light emitting element;
forming the first electrode from the conductive film by wet etching using a mask;
pattering the third insulating film by dry etching to form a patterned third insulating film, thereby exposing portion of the second insulating film;
forming a contact hole in the first insulating film, the second insulating film, and a gate insulating film of the thin film transistor wherein the contact hole is located in the exposed portion of the second insulating film;
forming a wire in the contact hole wherein the wire is brought into contact with the thin film transistor and the first electrode;
forming an organic compound layer over the first electrode; and
forming a second electrode over the organic compound layer. - View Dependent Claims (14, 17, 20)
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Specification