Light-emitting device and method of fabricating the same

• US 20050156179A1
• Filed: 02/17/2005
• Published: 07/21/2005
• Est. Priority Date: 12/12/2000
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamagata, Hirokazu
• Granted Patent: US 7,393,792 B2
• Time in Patent Office: Days
• US Class Current: 257/79
• CPC Class Codes: H01L 27/12 the substrate being other than a semiconductor body, e.g. an insulating body
• CPC Class Codes: H01L 27/1248 with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
• CPC Class Codes: H01L 29/66757 Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
• CPC Class Codes: H01L 29/78621 with LDD structure or an extension or an offset region or characterised by the doping profile
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 59/122 Pixel-defining structures or layers, e.g. banks
• CPC Class Codes: H10K 59/131 Interconnections, e.g. wiring lines or terminals

Abstract

A light-emitting device having a structure in which a mask used for forming a film such as an organic compound layer does not come in contact with the pixels in forming the light-emitting elements, and a method of fabricating the same. In fabricating the light-emitting device of the active matrix type, a partitioning wall constituted by a second wiring and a separation portion is formed on the interlayer-insulating film, and the pixels are surrounded by the partitioning wall, preventing the mask from coming into direct contact with the pixels, the mask being used for forming the organic compound layer and the opposing electrode of the light-emitting elements.

Claims

1-81. -81. (canceled)

82. A display device comprising:

a TFT over a substrate;

a light-emitting element over the substrate, the light-emitting element comprising a first electrode, a light-emitting layer and a second electrode;

a first wiring electrically connected to the first electrode;

an insulating film provided over the first wiring; and

a second wiring provided over the first wiring and over the insulating film, wherein the second wiring is electrically connected to the TFT and the first wiring.

83. A display device according to claim 82, wherein the light-emitting layer comprises an organic compound layer.

84. A display device according to claim 82, wherein the TFT is a current control TFT.

85. A display device according to claim 82, wherein the TFT comprises a source region, a drain region and a channel region.

86. An electronic apparatus having the display device according to claim 82.

87. An electronic apparatus according to claim 86, wherein the electronic apparatus is selected from the group consisting of a digital camera, a notebook-type personal computer, a mobile computer, a portable image-reproducing device equipped with a recording medium, a goggle-type display, a video camera, a portable telephone, a navigation system, a sound reproduction device and a game machine.

88. A display device comprising:

a TFT over a substrate;

a light-emitting element over the substrate, the light-emitting element comprising a first electrode, a light-emitting layer and a second electrode;

a first wiring electrically connected to the first electrode;

an insulating film provided over the first wiring;

a second wiring provided over the first wiring and over the insulating film, wherein the second wiring is electrically connected to the TFT and the first wiring; and

a separation portion provided over the second wiring.

89. A display device according to claim 88, wherein the light-emitting layer comprises an organic compound layer.

90. An electronic apparatus having the display device according to claim 88.

91. An electronic apparatus according to claim 90, wherein the electronic apparatus is selected from the group consisting of a digital camera, a notebook-type personal computer, a mobile computer, a portable image-reproducing device equipped with a recording medium, a goggle-type display, a video camera, a portable telephone, a navigation system, a sound reproduction device and a game machine.

92. A display device according to claim 88, wherein the separation portion comprises a material that provides an etching rate smaller than that of a material forming the second wiring with respect to an etching solution selected from the group consisting of a hydrofluoric acid, a mixed solution containing a hydrofluoric acid, and a mixed solution of phosphoric acid, nitric acid and acetic acid.

93. A display device according to claim 88, wherein the separation portion comprises a material selected from the group consisting of an inorganic material, a metal and an organic resin.

94. A display device according to claim 88, wherein the TFT is a current control TFT.

95. A display device according to claim 88, wherein the TFT comprises a source region, a drain region and a channel region.

96. A method of fabricating a display device comprising:

forming a source region, a drain region and a channel region over a substrate;

forming a gate insulating film over the source region, the drain region and the channel region;

forming a gate electrode and a first wiring;

forming an insulating film over the gate electrode and over the first wiring;

removing part of the insulating film formed over the first wiring;

forming a second wiring over the first wiring and over the insulating film, wherein the second wiring is electrically connected to one of the source region and the drain region;

forming a separation portion over the second wiring; and

forming a light-emitting element electrically connected to the first wiring.

97. A method of fabricating a display device according to claim 96, wherein the display device is incorporated into an electronic apparatus selected from the group consisting of a digital camera, a notebook-type personal computer, a mobile computer, a portable image-reproducing device equipped with a recording medium, a goggle-type display, a video camera, a portable telephone, a navigation system, a sound reproduction device and a game machine.

98. A method of fabricating a display device according to claim 96, wherein the separation portion comprises a material that provides an etching rate smaller than that of a material forming the second wiring with respect to an etching solution selected from the group consisting of a hydrofluoric acid, a mixed solution containing a hydrofluoric acid, and a mixed solution of phosphoric acid, nitric acid and acetic acid.

99. A method of fabricating a display device according to claim 96, wherein the separation portion comprises a material selected from the group consisting of an inorganic material, a metal and an organic resin.

100. A method of fabricating a display device comprising:

forming a source region, a drain region and a channel region over a substrate;

forming a gate insulating film over the source region, the drain region and the channel region;

forming a gate electrode and a first wiring;

forming an insulating film over the gate electrode and over the first wiring;

removing part of the insulating film formed over the first wiring;

forming a second wiring over the first wiring and over the insulating film, wherein the second wiring is electrically connected to one of the source region and the drain region;

forming a separation portion over the second wiring; and

forming a first electrode, a light-emitting layer and a second electrode of a light-emitting element by using the separation portion as a mask.

101. A method of fabricating a display device according to claim 100, wherein the display device is incorporated into an electronic apparatus selected from the group consisting of a digital camera, a notebook-type personal computer, a mobile computer, a portable image-reproducing device equipped with a recording medium, a goggle-type display, a video camera, a portable telephone, a navigation system, a sound reproduction device and a game machine.

102. A method of fabricating a display device according to claim 100, wherein the separation portion comprises a material that provides an etching rate smaller than that of a material forming the second wiring with respect to an etching solution selected from the group consisting of a hydrofluoric acid, a mixed solution containing a hydrofluoric acid, and a mixed solution of phosphoric acid, nitric acid and acetic acid.

103. A method of fabricating a display device according to claim 100, wherein the separation portion comprises a material selected from the group consisting of an inorganic material, a metal and an organic resin.

104. A method of fabricating a display device according to claim 100, wherein the first electrode is formed in contact with the first wiring.

105. A method of fabricating a display device comprising:

forming a source region, a drain region and a channel region over a substrate;

forming a gate insulating film over the source region, the drain region and the channel region;

forming a gate electrode and a first wiring;

forming a first insulating film over the gate electrode and over the first wiring;

removing part of the first insulating film formed over the first wiring;

forming a second wiring over the first wiring and over the first insulating film, wherein the second wiring is electrically connected to one of the source region and the drain region;

forming a second insulating film over the second wiring; and

forming a partitioning wall by etching the second wiring and the second insulating film.

106. A method of fabricating a display device according to claim 105, wherein the display device is incorporated into an electronic apparatus selected from the group consisting of a digital camera, a notebook-type personal computer, a mobile computer, a portable image-reproducing device equipped with a recording medium, a goggle-type display, a video camera, a portable telephone, a navigation system, a sound reproduction device and a game machine.

107. A method of fabricating a display device according to claim 105, wherein the second insulating film comprises a material that provides an etching rate smaller than that of a material forming the second wiring with respect to an etching solution selected from the group consisting of a hydrofluoric acid, a mixed solution containing a hydrofluoric acid, and a mixed solution of phosphoric acid, nitric acid and acetic acid.

108. A method of fabricating a display device according to claim 105, wherein the second insulating film comprises a material selected from the group consisting of an inorganic material, a metal and an organic resin.