Examination apparatus for biological sample and chemical sample
First Claim
1. A semiconductor integrated circuit device formed on an SOI substrate, comprising:
- a first semiconductor region of second conductivity type which is formed on said SOI substrate and in which a plurality of MOS transistors of first conductivity type are formed;
a second semiconductor region of first conductivity type which is formed on said SOI substrate and in which a plurality of MOS transistors of second conductivity type are formed;
a plurality of wirings formed on said first and second semiconductor regions; and
an oxide layer for electrically isolating said wirings or said wirings from said SOI substrate, wherein sidewalls of said oxide layer are covered with an ion impermeable insulating film.
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Accused Products
Abstract
A wireless sensor chip suitable for the compact, high-sensitive, and low-cost examination apparatus for easily examining a biological material such as gene at low cost is provided. A sensor chip is formed on an SOI substrate, and an n type semiconductor layer on which a pMOS transistor is formed and a p type semiconductor layer on which an nMOS transistor is formed are isolated by a pn junction. Therefore, the p type semiconductor layer at the outermost portion (chip edge portion to be in contact with solution) is set to floating, and the maximum potential and the minimum potential of the chip are supplied to an n type semiconductor layer and a p type semiconductor layer inside the outermost portion, respectively. Also, the chip is covered with an ion impermeable insulating film for reducing the penetration of positive ions through the oxide layer.
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Citations
22 Claims
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1. A semiconductor integrated circuit device formed on an SOI substrate, comprising:
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a first semiconductor region of second conductivity type which is formed on said SOI substrate and in which a plurality of MOS transistors of first conductivity type are formed;
a second semiconductor region of first conductivity type which is formed on said SOI substrate and in which a plurality of MOS transistors of second conductivity type are formed;
a plurality of wirings formed on said first and second semiconductor regions; and
an oxide layer for electrically isolating said wirings or said wirings from said SOI substrate, wherein sidewalls of said oxide layer are covered with an ion impermeable insulating film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A sensor chip, comprising:
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a sensor portion;
a signal processing circuit for processing sensing signals from said sensor portion;
a communication control circuit for controlling a communication with an external device;
an interface circuit for converting said sensing signals processed in said signal processing circuit into radio frequency signals; and
a coil and a resonant capacitor for transmitting said radio frequency signals to said external device, wherein said sensor portion, said signal processing circuit, said communication control circuit, said interface circuit, and said coil and resonant capacitor are integrated on a chip, said sensor chip is formed on an SOI substrate, a plurality of wirings formed on said SOI substrate and an oxide layer for electrically isolating said wirings or said wirings from said SOI substrate are formed, and sidewalls of said oxide layer are covered with an ion impermeable insulating film. - View Dependent Claims (11, 12, 13, 14, 15)
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16. A measurement system, comprising:
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reaction vessels;
a reader/writer;
an antenna connected to said reader/writer; and
sensor chips put into said reaction vessels, wherein said sensor chip can receive signals from said antenna or transmit sensing data to said reader/writer via said antenna, said sensor chip is formed on an SOI substrate, a plurality of wirings formed on said SOI substrate and an oxide layer for electrically isolating said wirings are formed, and sidewalls of said oxide layer are covered with an ion impermeable insulating film. - View Dependent Claims (17, 18, 19, 20, 21, 22)
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Specification