Lithography device for semiconductor circuit pattern generation
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Abstract
General purpose methods for the fabrication of integrated circuits from flexible membranes formed of very thin low stress dielectric materials, such as silicon dioxide or silicon nitride, and semiconductor layers. Semiconductor devices are formed in a semiconductor layer of the membrane. The semiconductor membrane layer is initially formed from a substrate of standard thickness, and all but a thin surface layer of the substrate is then etched or polished away. In another version, the flexible membrane is used as support and electrical interconnect for conventional integrated circuit die bonded thereto, with the interconnect formed in multiple layers in the membrane. Multiple die can be connected to one such membrane, which is then packaged as a multi-chip module. Other applications are based on (circuit) membrane processing for bipolar and MOSFET transistor fabrication, low impedance conductor interconnecting fabrication, flat panel displays, maskless (direct write) lithography, and 3D IC fabrication.
105 Citations
239 Claims
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1-76. -76. (canceled)
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77. A semiconductor processing lithography apparatus for maskless pattern generation comprising:
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an array of radiation source cells arranged in rows and columns, the array being formed with at least one flexible dielectric layer; and
control logic underlying the at least one flexible dielectric layer for controlling the array of radiation source cells, wherein each cell comprises;
a source of radiation;
a target on which the radiation is incident for generating X-rays; and
an aperture for emitting the X-rays from the target onto a surface to be exposed. - View Dependent Claims (78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98)
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99. A lithography pattern generating device comprising:
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an array of cells arranged in rows and columns, the array being formed with at least one flexible dielectric layer, each cell being individually controlled to permit passage of charged particles from an external source; and
control logic underlying the at least one flexible dielectric layer for controlling each cell;
wherein each cell comprises an aperture for emitting the particles onto a surface to be exposed. - View Dependent Claims (100, 101, 102, 103, 104, 105, 106, 107, 108, 109, 110, 111, 112, 113, 114, 115, 116, 117, 118, 119, 120, 121)
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122. A semiconductor processing lithography apparatus for maskless pattern generation comprising:
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an array of radiation source cells arranged in rows and columns, the array being formed with at least one flexible dielectric layer; and
control logic for controlling the array of radiation source cells, wherein each cell comprises;
a source of radiation;
a target on which the radiation is incident for generating X-rays; and
an aperture for emitting the X-rays from the target onto a surface to be exposed. - View Dependent Claims (123, 124, 125, 126, 127, 128, 129, 130, 131, 132, 133, 134, 135, 136, 137, 138, 139, 140, 141, 142, 143)
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144. A lithography pattern generating device comprising:
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an array of cells arranged in rows and columns, the array being formed with at least one flexible dielectric layer, each cell being individually controlled to permit passage of charged particles from an external source; and
control logic for controlling each cell;
wherein each cell comprises an aperture for emitting the particles onto a surface to be exposed. - View Dependent Claims (145, 146, 147, 148, 149, 150, 151, 152, 153, 154, 155, 156, 157, 158, 159, 160, 161, 162, 163, 164, 165, 166, 167)
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168. A lithography pattern generating device comprising:
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an array of cells arranged in rows and columns, the array being formed with at least one flexible dielectric layer, each cell defining an aperture to permit passage of charged particles from a source;
a movable shutter for covering each aperture to block the passage; and
control logic underlying the at least one flexible dielectric layer for controlling movement of the shutter for each aperture. - View Dependent Claims (169, 170, 171, 172, 173, 174, 175, 176, 177, 178, 179, 180, 181, 182, 183, 184, 185, 186, 187, 188, 189, 190)
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191. A lithography pattern generating device comprising:
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an array of cells arranged in rows and columns, the array being formed with at least one flexible dielectric layer, each cell defining an aperture to permit passage of charged particles from a source;
a movable shutter for covering each aperture to block the passage; and
control logic for controlling movement of each shutter. - View Dependent Claims (192, 193, 194, 195, 196, 197, 198, 199, 200, 201, 202, 203, 204, 205, 206, 207, 208, 209, 210, 211, 212, 213)
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214. A lithography tool comprising:
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an array of radiation source cells formed on a first substrate with a major portion of the first substrate removed, wherein each radiation source cell selectively irradiates a minute area of a second substrate placed in proximity to the lithography tool; and
control circuitry integrated with the first substrate for individually controlling each of the radiation source cells. - View Dependent Claims (215, 216, 217, 218, 219, 220, 221, 222, 223, 224, 225, 226, 227, 228, 229, 230, 231, 232, 233, 234, 235, 236, 237, 238, 239)
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Specification