Probe card configuration for low mechanical flexural strength electrical routing substrates
First Claim
1. A probe card assembly for testing a device comprising:
- a substrate with probe contacts on a first surface;
a probe card to electrically connect said probe contacts to a test system;
an electrical connection means to connect the probe contacts to the probe card; and
support means positioned against a second surface of the substrate substantially opposite said probe contacts without electrically connecting to the probe contacts, the support means transmitting probe forces introduced when the probe contacts are urged against corresponding contacts on the device being tested.
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Accused Products
Abstract
A mechanical support configuration for a probe card of a wafer test system is provided to increase support for a very low flexural strength substrate that supports spring probes. Increased mechanical support is provided by: (1) a frame around the periphery of the substrate having an increased sized horizontal extension over the surface of the substrate; (2) leaf springs with a bend enabling the leaf springs to extend vertically and engage the inner frame closer to the spring probes; (3) an insulating flexible membrane, or load support member machined into the inner frame, to engage the low flexural strength substrate farther away from its edge; (4) a support structure, such as support pins, added to provide support to counteract probe loading near the center of the space transformer substrate; and/or (5) a highly rigid interface tile provided between the probes and a lower flexural strength space transformer substrate.
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Citations
53 Claims
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1. A probe card assembly for testing a device comprising:
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a substrate with probe contacts on a first surface;
a probe card to electrically connect said probe contacts to a test system;
an electrical connection means to connect the probe contacts to the probe card; and
support means positioned against a second surface of the substrate substantially opposite said probe contacts without electrically connecting to the probe contacts, the support means transmitting probe forces introduced when the probe contacts are urged against corresponding contacts on the device being tested. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 50)
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17-25. -25. (canceled)
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26. A probe card assembly for testing a wafer comprising:
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a substrate having a surface supporting probe contacts; and
a frame provided around a peripheral edge of the substrate, the frame including a horizontal extension extending over the surface of the substrate supporting the probe contacts, the horizontal extension comprising a load support member extending vertically from a surface of the horizontal extension to engage the surface of the substrate supporting the probe contacts in an area separated from the peripheral edge of the substrate. - View Dependent Claims (27, 28, 29, 30, 31)
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32-42. -42. (canceled)
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43. A probe card assembly for testing a device comprising:
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a first substrate with probe contacts on a first surface, the first substrate comprising a first material;
a second substrate attached to a second surface of the first substrate, the second substrate including routing lines electrically connecting to the probe contacts, the routing lines further providing connections to a test system, the second substrate comprising a second material different than the first material;
a printed circuit board (PCB) having connectors for connecting to a test head on one side, and electrical connections provided on a second side for connecting to the routing lines of a second substrate;
an bracket fixedly connected to the PCB;
a frame provided around a peripheral edge of the second substrate, the frame including a horizontal extension extending over the first surface of the second substrate, wherein the horizontal extension comprises a load support member extending vertically from a surface of the horizontal extension to engage the surface of the second substrate supporting the probe contacts in an area separated from the peripheral edge of the second substrate; and
leaf springs having a first end attached to the bracket and a second end to engage a surface of the frame. - View Dependent Claims (44, 45, 46)
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47-49. -49. (canceled)
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51. A probe card assembly for testing a device comprising:
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a substrate with probe contacts on a first surface;
a probe card to electrically connect said probe contacts to a test system;
an electrical connection means to connect the probe contacts to the probe card; and
support means positioned against a second surface of the substrate substantially opposite said probe contacts and rigidly connecting to the probe card, wherein the support means transmits probe forces introduced to the probe card when the probe contacts are urged against corresponding contacts on the device being tested. - View Dependent Claims (52, 53)
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Specification