Micromirror device and method for making the same
First Claim
Patent Images
1. A spatial light modulator device, comprising:
- an array of micromirror devices on a substrate, each of which comprises;
a reflective mirror plate;
a hinge to which the mirror plate is attached such that the mirror plate can move relative to the substrate, wherein the deformable hinge is positioned in a different plane than the mirror plate leaving a gap between the mirror plate and hinge in a direction perpendicular to the mirror plate when the mirror plate is not moved;
wherein the mirror plate and/or the deformable hinge comprises single crystal silicon.
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Abstract
Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
70 Citations
39 Claims
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1. A spatial light modulator device, comprising:
an array of micromirror devices on a substrate, each of which comprises;
a reflective mirror plate;
a hinge to which the mirror plate is attached such that the mirror plate can move relative to the substrate, wherein the deformable hinge is positioned in a different plane than the mirror plate leaving a gap between the mirror plate and hinge in a direction perpendicular to the mirror plate when the mirror plate is not moved;
wherein the mirror plate and/or the deformable hinge comprises single crystal silicon. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
- 14. The device of claim 14, wherein the hinge comprises SiNx.
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38. A spatial light modulator device for use in a display system, comprising:
an array of micromirror devices, each of which comprises;
a deflectable and reflective mirror plate that is a single crystal silicon; and
a deformable hinge to which the mirror plate is attached such that the mirror plate is operable to rotate along a rotation axis; and
a thin film electrical conducting extending plate that is connected to the mirror plate.
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39-130. -130. (canceled)
Specification