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Proximity substrate preparation sequence, and method, apparatus, and system for implementing the same

  • US 20050158473A1
  • Filed: 06/30/2004
  • Published: 07/21/2005
  • Est. Priority Date: 09/30/2002
  • Status: Active Grant
First Claim
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1. A method for preparing a surface of a substrate, the method comprising:

  • scanning the surface of the substrate using a meniscus;

    preparing the surface of the substrate using the meniscus; and

    performing a next preparation operation on the surface of the substrate that was prepared without performing a rinsing operation.

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