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Bioarray chip reaction apparatus and its manufacture

  • US 20050158819A1
  • Filed: 10/27/2004
  • Published: 07/21/2005
  • Est. Priority Date: 06/08/1994
  • Status: Abandoned Application
First Claim
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1. A method of making probe chips comprising the steps of:

  • forming a plurality of probe arrays on a wafer;

    separating said wafer into a plurality of chips, each of said chips comprising at least one probe array thereon; and

    mating at least one of said chips to a package, said package comprising a reaction chamber, said reaction chamber comprising inlets for flowing fluid therein, said at least one probe array in fluid communication with said reaction chamber.

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