Method and apparatus for automatic sensor installation

• US 20050159911A1
• Filed: 12/30/2004
• Published: 07/21/2005
• Est. Priority Date: 07/03/2002
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Hartmann, Steven, Funk, Merritt
• Application Number:
  US11/025,396
• Publication Number:
  US 20050159911A1
• Time in Patent Office: Days
• US Class Current: 702/104
• CPC Class Codes: G05B 19/418 Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
• CPC Class Codes: G05B 2219/31334 Database with devices, configuration, of plant
• CPC Class Codes: G05B 2219/32128 Gui graphical user interface
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
• CPC Class Codes: Y02P 90/80 Management or planning

Abstract

Graphical User Interfaces (GUIs) are presented for configuring and setting-up sensors for monitoring tool and process performance in a semiconductor processing system. The semiconductor processing system includes a number of processing tools, a number of processing modules (chambers), and a number of sensors. The graphical display is organized so that all significant parameters are clearly and logically displayed so that the user is able to perform the desired configuration and setup tasks with as little input as possible. The GUI is web-based and is viewable by a user using a web browser.

Claims

1. A method for configuring a plurality of sensors in a semiconductor processing system using Graphical User Interfaces (GUIs), the method comprising:

accessing a System Configuration GUI screen;

selecting a configuration option;

selecting a sensor type option; and

using at least one of a sensor type list screen, a sensor information screen, and a sensor parameters screen to create a sensor type for each sensor.

2. The method as claimed in claim 1, further comprising:

using a sensor type list GUI screen to select a sensor type;

using a sensor information GUI screen to determine a plurality of parameters associated with the sensor type; and

using a sensor parameter GUI screen to determine a value type for each parameter.

3. The method as claimed in claim 2, further comprising:

creating a new sensor type for a sensor using the sensor type list GUI screen;

defining the new sensor type using sensor parameters comprising at least two of the following;

Sensor_Type, Parm_Name, Value_Type, Numeric_Min, Numeric_Max, IS_Optional, IS_Invisible, IS-Per-Instance, IS_Computed, Prompt, Description, Default_Value, and Value_Data; and

saving the new sensor type.

4. The method as claimed in claim 3, wherein the Value_Type comprises one of a Static Value_Type, a Once/Instance Value_Type, and a Changeable with DC Plan Value_Type

5. The method as claimed in claim 2, further comprising:

editing an existing sensor type using the sensor type list GUI screen;

defining an edited sensor type by changing at least one of the following parameters;

Sensor_Type, Parm_Name, Value_Type, Numeric_Min, Numeric_Max, Is_Optional, Is_Invisible, Is-Per-Instance, Is_Computed, Prompt, Description, Default_Value, and Value_Data; and

saving the edited sensor type.

6. The method as claimed in claim 2, further comprising:

selecting an existing sensor type using the sensor type list GUI screen; and

deleting the selected sensor type.

7. The method as claimed in claim 1, further comprising;

selecting a sensor instance option from an item menu; and

configuring a sensor instance for each sensor using at least one of a Sensor List GUI screen, a Sensor Information GUI screen, and a Sensor Setup Item Information GUI screen.

8. The method as claimed in claim 7, further comprising:

creating a new sensor instance in the semiconductor processing system using the sensor list GUI screen;

defining the new sensor instance using sensor parameters comprising at least two of the following;

Sensor_Type, Tool_ID, Module ID, Parm_Name, Parm_Value, Value_Type, Default_Value, Numeric_Min, Numeric_Max, Description, and is_enabled; and

saving the new sensor instance.

9. The method as claimed in claim 7, further comprising:

editing an existing sensor instance in the semiconductor processing system using the sensor list GUI screen;

defining the edited sensor instance by changing at least one of the following;

Sensor_Type, Tool_ID, Module ID, Parm_Name, Parm_Value, Value_Type, Default_Value, Numeric_Min, Numeric_Max, Description, and is_enabled; and

saving the edited sensor instance.

10. The method as claimed in claim 7, further comprising:

determining a sensor setup plan; and

executing the sensor setup plan to set up each sensor.

11. The method as claimed in claim 10, further comprising:

selecting a sensor instance from a list of sensor instances on the plan GUI screen; and

adding the selected sensor instance to the selected instances for this plan list.

12. The method as claimed in claim 10, further comprising:

selecting a sensor instance from a selected instances for this plan list on the plan GUI screen; and

moving the selected sensor instance from the selected instances for this plan list to the list of sensor instances list.

13. The method as claimed in claim 1, wherein the GUIs comprises at least one screen containing selection tabs from a group consisting of left-to-right tabs, right-to-left tabs, top-to-bottom tabs, and bottom-to-top tabs.

14. The method as claimed in claim 1, wherein the GUIs comprise at least one multi-level navigation tree from a group consisting of an English language multi-level navigation tree, a Japanese language multi-level navigation tree, a Taiwanese language multi-level navigation tree, a Chinese language multi-level navigation tree, a Korean language multi-level navigation tree, a German language multi-level navigation tree, and a French language multi-level navigation tree.

15. The method as claimed in claim 1, wherein at least one GUI screen comprises a title panel, an information panel, and a control panel.

16. The method as claimed in claim 15, wherein the title panel comprises a company logo block to display version information, a user ID block to display the ID of the current user, an alarm message block to display an alarm message when there is an active alarm, a current date and time block to display the current date and time of the server, a current screen name block to display the name of the current screen, a communication status block to display the current status for communications link between server and tool, a tool ID block to display the ID of the tool being monitored, a logoff block to allow a user to log off, and a select screen block to view a list of all available screens.

17. The method as claimed in claim 15, wherein the control panel comprises a tool status button, a chamber button, a charts button, an alarms button, a SPC button, a control setup button, and a help button.

18. The method as claimed in claim 1, wherein the GUIs comprises at least one of an English language screen, a Japanese language screen, a Taiwanese language page, a Chinese language screen, a Korean language screen, a German language screen, and a French language screen.

19. The method as claimed in claim 10, further comprising executing a data collection plan to determine the sensor setup plan.

20. The method as claimed in claim 19, further comprising executing a control strategy to determine the data collection plan.

21. The method as claimed in claim 20, further comprising determining the control strategy using process context, the process context being dependent upon at least one of a process being performed, a sensor instance, a processing module being monitored, and a tool being monitored.

22. A method for configuring a sensor in a semiconductor processing system using Graphical User Interfaces (GUIs), the method comprising:

configuring a sensor type using at least one of a sensor type list GUI screen, a sensor info GUI screen, and a sensor parameters GUI screen; and

configuring a sensor instance using at least one of a sensor list GUI screen, a sensor info GUI screen, and a sensor setup item info GUI screen.

23. The method for configuring a sensor as claimed in claim 22, wherein the configuring of the sensor type further comprises:

creating a new sensor type using the sensor type list GUI screen;

defining the new sensor type using a sensor parameters table comprising at least two of the following fields;

Sensor_Type, Parm_Name, Value_Type, Numeric_Min, Numeric_Max, IS_Optional, IS_Invisible, IS-Per-Instance, IS_Computed, Prompt, Description, Default_Value, and Value_Data;

configuring at least one parameter using the sensor parameters GUI screen; and

saving the new sensor type.

24. The method for configuring a sensor as claimed in claim 22, wherein the configuring of the sensor type further comprises:

editing an existing sensor type using the sensor type list GUI screen;

defining an edited sensor type using a sensor parameters table comprising at least two of the following fields;

Sensor Type, Parm_Name, Value_Type, Numeric_Min, Numeric_Max, Is_Optional, Is_Invisible, Is-Per-Instance, Is_Computed, Prompt, Description, Default_Value, and Value_Data;

configuring at least one parameter using the sensor parameters GUI screen; and

saving the edited sensor type.

25. A control system and Graphical User Interfaces (GUIs) for configuring a sensor in a semiconductor processing system comprising:

means for configuring a sensor type for each different type of sensor in the semiconductor processing system using at least one of a sensor type list GUI screen, a sensor info GUI screen, and a sensor parameters GUI screen; and

means for configuring a sensor instance for each sensor in the semiconductor processing system using at least one of a sensor list GUI screen, a sensor info GUI screen, and a sensor setup item info GUI screen.

26. A control system and Graphical User Interfaces (GUIs) for configuring a sensor in a semiconductor processing system comprising:

means for executing a data collection plan;

means for determining a sensor setup plan using the data collection plan; and

means for executing the sensor setup plan to set up the sensor.