Pressure sensors having stable gauge transducers
First Claim
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1. A pressure sensor structure comprising:
- a substrate;
a compliant member mounted on said substrate in a manner such that said compliant member has first and second opposing exposed surfaces; and
at least one strain transducer mounted on a surface of said compliant member, wherein said at least one strain transducer is fabricated from a stable gauge material.
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Abstract
Implantable pressure sensors and methods for making and using the same are provided. A feature of embodiments of the subject pressure sensors is that they are low-drift sensors. The subject sensors find use in a variety of applications.
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Citations
40 Claims
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1. A pressure sensor structure comprising:
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a substrate;
a compliant member mounted on said substrate in a manner such that said compliant member has first and second opposing exposed surfaces; and
at least one strain transducer mounted on a surface of said compliant member, wherein said at least one strain transducer is fabricated from a stable gauge material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
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Specification