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Method for the plasma cleaning of the surface of a material coated with an organic substance and the installation for carrying out said method

  • US 20050161433A1
  • Filed: 02/19/2003
  • Published: 07/28/2005
  • Est. Priority Date: 02/19/2002
  • Status: Active Grant
First Claim
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1. A process for cleaning the surface of a material coated with an organic substance, which process comprises the steps consisting in:

  • introducing said material into a treatment chamber, having a pressure of between 10 mbar and 1 bar therein, which is supplied with a gas stream containing at least 90% oxygen by volume; and

    generating a plasma by passing an electric discharge between the surface of said material and a dielectric-covered electrode, so as to break down said organic substance through the action of the free radicals O. thus produced.

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