Moisture protection for an electromechanical transducer
First Claim
1. Strain gauge comprising:
- a strain-sensitive electrical resistor track;
connector electrodes for contacting the resistor track arranged on a carrier substrate; and
a protective coating of inorganic materials covering at least part of the carrier substrate and/or of the resistor track and/or of the connector electrodes, wherein a build-up structure of the protective coating over a range of coating thickness is inhomogeneous, and the protective coating is underlaid with a surface-smoothing polymer layer which evens out rough surface portions of an area to be coated, wherein a layer thickness of the surface-smoothing layer is at least equal to the thickness of a protective coating.
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Accused Products
Abstract
A strain gauge with a strain-sensitive electrical resistor track and connector electrodes for contacting the resistor track arranged on a carrier substrate is provided with a protective coating having inorganic materials and covering at least part of the carrier substrate and/or of the resistor track and/or of the connector electrodes. The build-up structure of the protective coating over the range of the coating thickness is inhomogeneous, and the protective coating is underlaid with a surface-smoothing polymer layer which evens out rough surface portions of the area to be coated. The layer thickness of the surface-smoothing layer is at least equal to the thickness of the protective coating. A strain gauge of this type can be used in a force-measuring cell, where the surface-smoothing layer and the protective coating can be deposited after an uncoated strain gauge has been installed on the deformable body of the force-measuring cell.
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Citations
19 Claims
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1. Strain gauge comprising:
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a strain-sensitive electrical resistor track;
connector electrodes for contacting the resistor track arranged on a carrier substrate; and
a protective coating of inorganic materials covering at least part of the carrier substrate and/or of the resistor track and/or of the connector electrodes, wherein a build-up structure of the protective coating over a range of coating thickness is inhomogeneous, and the protective coating is underlaid with a surface-smoothing polymer layer which evens out rough surface portions of an area to be coated, wherein a layer thickness of the surface-smoothing layer is at least equal to the thickness of a protective coating. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. Method of producing a protective coating on an individual strain gauge or on a single-row array or two-dimensional array of strain gauges, comprising:
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depositing a surface-smoothing polymer layer on at least a part of a carrier substrate and/or on a resistor track and/or connector electrodes of a strain gauge; and
depositing a thin inorganic protective coating on the surface-smoothing polymer layer, wherein deposition process parameters are varied such that an inorganic protective coating is formed which is inhomogeneous over a thickness of the protective coating. - View Dependent Claims (15, 16)
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17. Method of producing a protective coating on a at least one strain gauge installed on a deformable body of a force measuring cell, said strain gauge having a strain-sensitive electrical resistor track and connector electrodes for contacting the resistor track arranged on a carrier substrate, the method comprising:
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depositing a surface-smoothing polymer layer on at least a part of the carrier substrate and/or the resistor track and/or the connector electrodes and on the deformable body; and
depositing a thin inorganic protective coating on the surface-smoothing polymer layer, wherein the deposition process parameters are varied such that an inorganic protective coating is formed which is inhomogeneous over a thickness of the protective coating. - View Dependent Claims (18, 19)
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Specification