APPARATUS FOR OPTICAL INSPECTION OF WAFERS DURING PROCESSING
First Claim
1. A measurement station for use with a processing machine, which includes a processing station for processing an article and an exit station including an article transfer assembly and at least one articles’
- cassette, the measurement station being so dimensioned as to be installable in association with the exit station of the processing machine and comprising an optical system and a holding unit for receiving and holding the article in a measuring position during measurements, said optical system comprising;
a spectrophotometer;
an imaging system operable to locate measurements;
a beam directing assembly for directing illuminating light towards the article and directing collected light from the article towards a beam splitting assembly for separating a first portion of the collected light to propagate towards the spectrophotometer and a second portion to propagate to said imaging system.
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Accused Products
Abstract
Abstract of the Disclosure
An optical system is disclosed for the inspection of wafers during polishing which also includes a measurement system for measuring the thickness of the wafers top layer. The optical system views the wafer through a window and includes a gripping system, which places the wafer in a predetermined viewing location while maintaining the patterned surface completely under water. The optical system also includes a pull-down unit for pulling the measurement system slightly below the horizontal prior to the measurement and returns the measuring system to the horizontal afterwards
63 Citations
114 Claims
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1. A measurement station for use with a processing machine, which includes a processing station for processing an article and an exit station including an article transfer assembly and at least one articles’
- cassette, the measurement station being so dimensioned as to be installable in association with the exit station of the processing machine and comprising an optical system and a holding unit for receiving and holding the article in a measuring position during measurements, said optical system comprising;
a spectrophotometer;
an imaging system operable to locate measurements;
a beam directing assembly for directing illuminating light towards the article and directing collected light from the article towards a beam splitting assembly for separating a first portion of the collected light to propagate towards the spectrophotometer and a second portion to propagate to said imaging system. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100, 101, 102, 103, 104, 105, 106, 107, 108, 109, 110, 111)
- cassette, the measurement station being so dimensioned as to be installable in association with the exit station of the processing machine and comprising an optical system and a holding unit for receiving and holding the article in a measuring position during measurements, said optical system comprising;
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112. A measurement station for use with a processing machine, which includes a polisher for polishing an article and an exit station including an article transfer assembly and at least one articles’
- cassette, the measurement station being so dimensioned as to be installable in association with the exit station of the processing machine and comprising an optical system and a holding unit for receiving and holding the article in a measuring position during measurements, said optical system comprising a spectrophotometer;
an imaging system operable to locate measurements;
a beam directing assembly for directing illuminating light towards the article and directing collected light from the article towards a beam splitting assembly including a pin hole mirror for separating a first portion of the collected light to propagate towards the spectrophotometer and a second portion to propagate to said imaging system.
- cassette, the measurement station being so dimensioned as to be installable in association with the exit station of the processing machine and comprising an optical system and a holding unit for receiving and holding the article in a measuring position during measurements, said optical system comprising a spectrophotometer;
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113. A measurement station for use with a processing machine, which includes a processing station for processing an article and an exit station including an article transfer assembly and at least one articles’
- cassette, the measurement station being so dimensioned as to be installable in association with the exit station of the processing machine and comprising an optical system, a holding unit for receiving and holding the article in a measuring position during measurements, and a support assembly for supporting the article while transporting it in between said transfer assembly of the exit station and said holding unit, said optical system being configured and operable to enable measurement of a thickness of at least a top layer of the article, said optical system including a spectrophotometer;
an imaging system operable to locate measurements;
a beam directing assembly for directing illuminating light towards the article and directing collected light from the article towards a beam splitting assembly for separating a first portion of the collected light to propagate towards the spectrophotometer and a second portion to propagate to said imaging system.
- cassette, the measurement station being so dimensioned as to be installable in association with the exit station of the processing machine and comprising an optical system, a holding unit for receiving and holding the article in a measuring position during measurements, and a support assembly for supporting the article while transporting it in between said transfer assembly of the exit station and said holding unit, said optical system being configured and operable to enable measurement of a thickness of at least a top layer of the article, said optical system including a spectrophotometer;
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114. A measurement station for use with a processing machine, which includes a processing station for processing an article and an exit station including an article transfer assembly and at least one articles’
- cassette, the measurement station being so dimensioned as to be installable in association with the exit station of the processing machine and comprising an optical system, and a holding unit for receiving and holding the article in a measuring position during measurements, said optical system being configured and operable to enable measurement of a thickness of at least a top layer of the article, said optical system including a spectrophotometer;
an imaging system operable to locate measurements;
a beam directing assembly for directing illuminating light towards the article and directing collected light from the article towards a beam splitting assembly including a pin hole mirror for separating a first portion of the collected light to propagate towards the spectrophotometer and a second portion to propagate to said imaging system.
- cassette, the measurement station being so dimensioned as to be installable in association with the exit station of the processing machine and comprising an optical system, and a holding unit for receiving and holding the article in a measuring position during measurements, said optical system being configured and operable to enable measurement of a thickness of at least a top layer of the article, said optical system including a spectrophotometer;
Specification