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Electronic devices and its production methods

  • US 20050167795A1
  • Filed: 11/14/2003
  • Published: 08/04/2005
  • Est. Priority Date: 12/27/2002
  • Status: Active Grant
First Claim
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1. An electronic device having mounted thereon a microelectromechanical system element comprising a micromachine component and electronic component for operation of said micromachine component formed on a substrate, in which an operating space for said micromachine component is defined by said substrate and a lid bonded covering an active surface of said substrate, and said electronic component and wiring patterns of said lid are electrically connected at a bonded part of said substrate and said lid.

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