MEMS device with integral packaging
First Claim
1. A micro-switch, comprising:
- a first substrate and a second substrate bonded together to form a cavity;
on the first substrate, at least one signal path that runs from inside the cavity to outside the cavity at two locations; and
at least one movable structure on the second substrate, said movable structure comprising at least one conductive contact area, wherein at least one portion of said movable structure is inside said cavity, and the movable structure is moved in response to an attractive force provided by an actuator on the first substrate, wherein a state of electrical contact of said micro-switch is changed by moving said movable structure.
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Abstract
A MEMS device and method of making same is disclosed. In one embodiment, a micro-switch includes a base assembly comprising a movable structure bearing a contact pad. The base assembly is wafer-scale bonded to a lid assembly comprising an activator and a signal path. The movable structure moves within a sealed cavity formed during the bonding process. The signal path includes an input line and an output line separated by a gap, which prevents signals from propagating through the micro-switch when the switch is deactivated. In operation, a signal is launched into the signal path. When the micro-switch is activated, a force is established by the actuator, which pulls a portion of the movable structure upwards towards the gap in the signal path, until the contact pad bridges the gap between the input line and output line, allowing the signal to propagate through the micro-switch. Prior to bonding, the MEMS structures are annealed on a first wafer and the conductive traces and other metals are annealed on a second wafer to allow each wafer to be processed separately using different processes, e.g., different annealing temperatures.
103 Citations
76 Claims
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1. A micro-switch, comprising:
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a first substrate and a second substrate bonded together to form a cavity;
on the first substrate, at least one signal path that runs from inside the cavity to outside the cavity at two locations; and
at least one movable structure on the second substrate, said movable structure comprising at least one conductive contact area, wherein at least one portion of said movable structure is inside said cavity, and the movable structure is moved in response to an attractive force provided by an actuator on the first substrate, wherein a state of electrical contact of said micro-switch is changed by moving said movable structure. - View Dependent Claims (4, 5, 17, 18, 32, 33, 34, 35, 37, 39, 66, 67)
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68. A micro-switch, comprising:
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a first substrate and a second substrate bonded together to form a cavity using gold thermocompression bonding;
on the first substrate, at least one movable structure, said movable structure comprising at least one conductive contact area, wherein at least one portion of said movable structure is inside said cavity, said movable structure being moved in response to a magnetic force, wherein a state of electrical contract of said micro-switch is changed by moving said movable structure and wherein said movable structure is a seesaw structure; and
one or more signal paths that run from inside the cavity to outside the cavity. - View Dependent Claims (69, 70, 71, 72, 73, 74)
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75. A micro-switch, comprising:
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a first substrate and a second substrate bonded together to form a cavity using gold thermocompression bonding;
on the first substrate, at least one movable structure, said movable structure comprising at least one conductive contact area, wherein at least one portion of said movable structure is inside said cavity, said movable structure being moved in response to a thermal actuator, wherein a state of electrical contract of said micro-switch is changed by moving said movable structure; and
one or more signal paths that run from inside the cavity to outside the cavity.
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76. A micro-switch, comprising:
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a first substrate and a second substrate bonded together to form a cavity using gold thermocompression bonding;
on the first substrate, at least one movable structure, said movable structure comprising at least one capacitive contact area, wherein at least one portion of said movable structure is inside said cavity, said movable structure being moved in response to an electrostatic force, wherein a state of electrical contract of said micro-switch is changed by moving said movable structure and wherein said movable structure is a membrane; and
one or more signal paths that run from inside the cavity to outside the cavity.
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Specification