Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
First Claim
1. A spatial light modulator, comprising:
- a silicon substrate;
an optically transmissive substrate bonded to the silicon substrate and defining a gap therebetween, with an array of micromirrors disposed within the gap;
wherein the micromirrors are mechanically deflectable in a digital manner and are capable of being selectively deflected to spatially modulate light that is incident to, and then reflected back through, the optically transmissive substrate;
wherein each micromirror comprises a rigid mirror and a torsion hinge;
SRAM or DRAM circuitry on the silicon substrate at each micromirror location;
electrodes on the silicon substrate and connected to the SRAM or DRAM circuitry and for electrostatically attracting corresponding micromirrors;
wherein the electrodes are disposed closer to the corresponding micromirrors than the circuitry; and
wherein the mirror and torsion hinge are disposed in different layers with the torsion hinge crossing the mirror and attaching at a point on the mirror.
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Accused Products
Abstract
A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.
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Citations
39 Claims
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1. A spatial light modulator, comprising:
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a silicon substrate;
an optically transmissive substrate bonded to the silicon substrate and defining a gap therebetween, with an array of micromirrors disposed within the gap;
wherein the micromirrors are mechanically deflectable in a digital manner and are capable of being selectively deflected to spatially modulate light that is incident to, and then reflected back through, the optically transmissive substrate;
wherein each micromirror comprises a rigid mirror and a torsion hinge;
SRAM or DRAM circuitry on the silicon substrate at each micromirror location;
electrodes on the silicon substrate and connected to the SRAM or DRAM circuitry and for electrostatically attracting corresponding micromirrors;
wherein the electrodes are disposed closer to the corresponding micromirrors than the circuitry; and
wherein the mirror and torsion hinge are disposed in different layers with the torsion hinge crossing the mirror and attaching at a point on the mirror. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A spatial light modulator, comprising:
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a silicon substrate;
an optically transmissive substrate bonded to the silicon substrate and defining a gap therebetween, with an array of micromirrors disposed within the gap;
wherein the micromirrors are mechanically deflectable in a digital manner and are capable of being selectively deflected to spatially modulate light that is incident to, and then reflected back through, the optically transmissive substrate;
wherein each micromirror comprises a rigid mirror and a hinge;
RAM circuitry on the silicon substrate at each micromirror location;
electrodes on the silicon substrate and connected to the RAM circuitry and for electrostatically attracting corresponding micromirrors;
wherein the optically transmissive substrate and the silicon substrate are bonded together with spacers and epoxy. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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39. A projection system comprising:
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an optical source for providing light;
a spatial light modulator for spatially modulating light from the light source;
imaging optics for receiving light from the spatial light modulator;
wherein the spatial light modulator comprises;
a silicon substrate;
an optically transmissive substrate bonded to the silicon substrate and defining a gap therebetween, with an array of micromirrors disposed within the gap;
wherein the micromirrors are mechanically deflectable in a digital manner and are capable of being selectively deflected to spatially modulate light that is incident to, and then reflected back through, the optically transmissive substrate;
wherein each micromirror comprises a rigid mirror and a torsion hinge;
SRAM or DRAM circuitry on the silicon substrate at each micromirror location;
electrodes on the silicon substrate and connected to the SRAM or DRAM circuitry and for electrostatically attracting corresponding micromirrors;
wherein the electrodes are disposed closer to the corresponding micromirrors than the circuitry; and
wherein the mirror and torsion hinge are disposed in different layers with the torsion hinge crossing the mirror and attaching at a point on the mirror.
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Specification