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Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements

  • US 20050168795A1
  • Filed: 03/24/2005
  • Published: 08/04/2005
  • Est. Priority Date: 06/19/1995
  • Status: Active Grant
First Claim
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1. A spatial light modulator, comprising:

  • a silicon substrate;

    an optically transmissive substrate bonded to the silicon substrate and defining a gap therebetween, with an array of micromirrors disposed within the gap;

    wherein the micromirrors are mechanically deflectable in a digital manner and are capable of being selectively deflected to spatially modulate light that is incident to, and then reflected back through, the optically transmissive substrate;

    wherein each micromirror comprises a rigid mirror and a torsion hinge;

    SRAM or DRAM circuitry on the silicon substrate at each micromirror location;

    electrodes on the silicon substrate and connected to the SRAM or DRAM circuitry and for electrostatically attracting corresponding micromirrors;

    wherein the electrodes are disposed closer to the corresponding micromirrors than the circuitry; and

    wherein the mirror and torsion hinge are disposed in different layers with the torsion hinge crossing the mirror and attaching at a point on the mirror.

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