Method and apparatus for monitoring tool performance
First Claim
1. A method of monitoring a processing tool in a semiconductor processing system, the method comprising:
- putting the processing tool into a first state;
executing a tool health control strategy;
collecting tool health data for the processing tool;
executing a tool health analysis strategy;
analyzing the tool health data;
pausing the processing tool when an alarm has occurred; and
refraining from pausing the processing tool when an alarm has not occurred.
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Abstract
A method and system for monitoring tool performance for processing tools in a semiconductor processing system. The semiconductor processing system includes a number of processing tools, a number of processing modules, a number of sensors, and an alarm management system. A tool health control strategy is executed in which tool health data for the processing tool is collected. A tool health analysis strategy is executed in which the tool health data is analyzed. An intervention manager can pause the processing tool when an alarm has occurred. The intervention manager refrains from pausing the processing tool when an alarm has not occurred.
98 Citations
37 Claims
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1. A method of monitoring a processing tool in a semiconductor processing system, the method comprising:
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putting the processing tool into a first state;
executing a tool health control strategy;
collecting tool health data for the processing tool;
executing a tool health analysis strategy;
analyzing the tool health data;
pausing the processing tool when an alarm has occurred; and
refraining from pausing the processing tool when an alarm has not occurred. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A tool status monitoring system for monitoring a processing tool in a semiconductor processing system, the tool status monitoring system comprising:
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a plurality of sensors coupled to the processing tool;
means for executing a tool health control strategy including means for executing a data collection plan for collecting tool health data, and means for executing a data pre-processing plan for pre-processing the collected tool health data, the data collection plan comprising a sensor plan for controlling the data collected by the plurality of sensors;
means for executing a tool health analysis strategy including means for executing a analysis plan for analyzing the tool health data and means for executing a judgment plan for determining if an alarm has occurred; and
an intervention manager for pausing the processing tool when an alarm has occurred and refraining from pausing the processing tool when an alarm has not occurred. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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Specification