Scanning probe microscopy inspection and modification system
1 Assignment
0 Petitions
Accused Products
Abstract
A scanning probe microscopy (SPM) inspection and/or modification system which uses SPM technology and techniques. The system includes various types of microstructured SPM probes for inspection and/or modification of the object. The components of the SPM system include microstructured calibration structures. A probe may be defective because of wear or because of fabrication errors. Various types of reference measurements of the calibration structure are made with the probe or vice versa to calibrate it. The components of the SPM system further include one or more tip machining structures. At these structures, material of the tips of the SPM probes may be machined by abrasively lapping and chemically lapping the material of the tip with the tip machining structures.
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Citations
106 Claims
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1-88. -88. (canceled)
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89. A probe for delivering a fluid material to an object, the probe comprising:
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a tip with a capillary;
a microstructured pump having an inlet to receive the fluid material and an outlet in fluid communication with the capillary, the pump pumping the fluid material into the capillary so that the fluid material is ejected by the capillary and delivered to the object in response to a control signal received by the pump. - View Dependent Claims (90)
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91. A mask repair tool comprising:
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an SPM probe comprising a tip with a capillary;
a pump having an inlet to receive fluid material and an outlet in fluid communication with the capillary, the pump pumping the fluid material into the capillary so that the fluid material is ejected by the capillary and delivered to the mask in response to a control signal received by the pump. - View Dependent Claims (92, 93, 94)
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95. A method of performing repairs on a mask, the method comprising:
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receiving modification data representing a required addition to be made to the mask'"'"'s material; and
in response to the modification data, adding fluid material to the mask with an SPM probe. - View Dependent Claims (96, 97, 98, 99, 100, 101)
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102. A method of performing repairs on a mask, the method comprising:
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receiving modification data representing a required modification to be made to the mask'"'"'s material; and
in response to the modification data, directing an ion beam to the mask with an SPM probe configured as an ion beam tool. - View Dependent Claims (103, 104)
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105. A method of performing repairs on a mask, the method comprising:
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receiving modification data representing a required modification to be made to the mask'"'"'s material; and
in response to the modification data, directing an electron beam to the mask with an SPM probe configured as an electron beam tool.
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106. A method as recited in claim wherein 105 wherein the electron beam is used to chemically modify the mask'"'"'s material.
Specification