Method and apparatus for micromachines, microstructures, nanomachines and nanostructures

• US 20050172739A1
• Filed: 11/03/2004
• Published: 08/11/2005
• Est. Priority Date: 11/28/2001
• Status: Active Grant

• Current Assignee: Terraspan LLC
• Original Assignee: General Nanotechnology LLC
• Inventors: Kley, Victor B.
• Granted Patent: US 7,266,998 B2
• Time in Patent Office: Days
• US Class Current: 73/866.500
• CPC Class Codes: F04C 2/18 with similar tooth forms F04C2/16 takes precedence
• CPC Class Codes: F05C 2203/06 Silicon
• CPC Class Codes: F05C 2203/0882 Carbon, e.g. graphite
• CPC Class Codes: G01Q 70/10 Shape or taper
• CPC Class Codes: Y10S 977/873 Tip holder
• CPC Class Codes: Y10T 74/20582 Levers

Abstract

Parts and structures are described for micro and nano machines and the creation of macro structures with nano and micro layers of special materials to provide improved performance.

Claims

1. A cantilever assembly suitable for use in a scanning probe microscope (SPM) comprising a holder and a lever extending from the holder, the lever having a first major surface and a second major surface spaced apart from the first major surface and in parallel relation to the first major surface, the lever further having an end portion distal the holder, the end portion having a recessed region formed on the first major surface, the recessed region being suitable for receiving an object or serving as a mount point for an object, the lever further including one or more openings formed through the first major surface and the second major surface.

2. A cantilever assembly suitable for use in a scanning probe microscope (SPM) comprising a holder and a lever extending from the holder, the lever having a first major surface, the lever further having an end portion distal the holder, the end portion having a recessed region formed on the first major surface, the recessed region being suitable for receiving an object or serving as a mount point for an object, wherein the lever is ventilated.

3. A cantilever assembly suitable for use in a scanning probe microscope (SPM) comprising a holder and a lever extending from the holder, the lever having a first major surface, the lever further having an end portion distal the holder, the end portion having a recessed region formed on the first major surface, the recessed region being suitable for receiving an object or serving as a mount point for an object, wherein the holder includes a major surface having at least one recessed feature formed therein, the recessed feature having an opening that at least partially occludes an interior region of the recessed feature.