Memory cell dual protection
First Claim
1. A spatial light modulator for use in projection display applications, the spatial light modulator comprising:
- a substrate comprising a plurality of electrically active circuits;
an electrode layer electrically coupled to at least one of the plurality of electrically active circuits, wherein the electrode layer comprises a semi-continuous layer including at least one optical path;
a shielding layer electrically isolated from the electrode layer and disposed between the plurality of electrically active circuits and the electrode layer; and
an electrical connector coupling the shielding layer to a reference potential.
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Accused Products
Abstract
A spatial light modulator for use in projection display applications is provided. The spatial light modulator includes a substrate including a plurality of electrically active circuits and an electrode layer electrically coupled to at least one of the plurality of electrically active circuits. In one embodiment, the electrode layer includes a semi-continuous layer with at least one optical path. The spatial light modulator also includes a shielding layer electrically isolated from the electrode layer and disposed between the substrate and the plurality of electrically active circuits and an electrical connector coupling the shielding layer to a reference potential. In a specific embodiment, the shielding layer of the spatial light modulator converts incident light energy to electrical current and routes the current back to a source. In another specific embodiment, the shielding layer converts electrical field disturbance to electrical current and routes the current back to a source.
151 Citations
22 Claims
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1. A spatial light modulator for use in projection display applications, the spatial light modulator comprising:
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a substrate comprising a plurality of electrically active circuits;
an electrode layer electrically coupled to at least one of the plurality of electrically active circuits, wherein the electrode layer comprises a semi-continuous layer including at least one optical path;
a shielding layer electrically isolated from the electrode layer and disposed between the plurality of electrically active circuits and the electrode layer; and
an electrical connector coupling the shielding layer to a reference potential. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of fabricating a spatial light modulator having a cell and a dedicated ground plane, comprising:
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forming a first substrate defining a cavity;
fabricating an electrical reference plane on a second substrate;
fabricating an electrode on the second substrate;
bonding the first substrate to the second substrate;
forming a hinge and mirror plate on the first substrate; and
applying a reflective surface on the mirror plate and above a portion of the hinge, the reflective surface having an area greater than an area of the upper surface of the mirror plate. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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18. A method of protecting a semiconductor device from incident light and electrical field disturbances:
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receiving incident light on a ground plane;
blocking a portion of the incident light from reaching a substrate layer to reduce an intensity of light reaching the substrate layer;
receiving an electrical field disturbance at the ground plane;
blocking a portion of the electrical field disturbance from reaching the substrate layer; and
in response to the portions of the incident light and electrical field disturbance being translated into electrical current by the ground plane, routing the electrical current back to a source. - View Dependent Claims (19, 20, 21, 22)
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Specification