Microchip, method of manufacturing microchip, and method of detecting compositions

• US 20050175273A1
• Filed: 02/01/2005
• Published: 08/11/2005
• Est. Priority Date: 08/02/2002
• Status: Active Grant

• Current Assignee: NEC Corporation
• Original Assignee: NEC Corporation
• Inventors: Tokushima, Masatoshi, Iida, Kazuhiro, Shimoda, Tsuyoshi
• Granted Patent: US 7,058,244 B2
• Time in Patent Office: Days
• US Class Current: 385/15
• CPC Class Codes: B01L 2300/0654 Lenses; Optical fibres
• CPC Class Codes: B01L 2300/0816 Cards, e.g. flat sample carriers usually with flow in two horizontal directions
• CPC Class Codes: B01L 2300/0887 Laminated structure
• CPC Class Codes: B01L 2300/168 Specific optical properties, e.g. reflective coatings
• CPC Class Codes: B01L 3/502715 characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
• CPC Class Codes: G01N 2021/0346 Capillary cells; Microcells
• CPC Class Codes: G01N 21/05 Flow-through cuvettes G01N21/09 takes precedence; handling fluid samples G01N1/10

Abstract

A microchip includes a clad layer having a channel through which a sample flows, and an optical waveguide formed within the clad layer and having a higher refractive index than the clad layer. The optical waveguide is formed to act on the channel optically. Thus, the sample flowing in the channel can be analyzed with high accuracy even in the microchip having a fine structure.

Claims

1. A microchip comprising:

a clad layer having a channel through which a sample flows; and

at least one optical waveguide formed within said clad layer and having a higher refractive index than said clad layer,

wherein said optical waveguide is formed to act on said channel optically.

2. The microchip according to claim 1,

wherein a light led from one end of said optical waveguide passes through said channel and is come out from another end of said optical waveguide.

3. The microchip according to claim 2,

wherein said channel is formed to divide said optical waveguide.

4. The microchip according to claim 2,

wherein said at least one optical waveguide includes a plurality of optical waveguides, and

said plurality of optical waveguides are formed apart from each other in said clad layer.

5. The microchip according to claim 2,

wherein said one end and said another end of said optical waveguide are formed wider than another region of said optical waveguide.

6. The microchip according to claim 2,

wherein said optical waveguide is formed wider at a boundary between said optical waveguide and said channel than another region of said optical waveguide.

7. The microchip according to claim 1,

wherein said at least one optical waveguide includes a plurality of optical waveguides,

said plurality of optical waveguides are formed within said clad layer, said plurality of optical waveguides including:

a plurality of light leading optical waveguides; and

a light receiving optical waveguide,

said channel is formed between said plurality of light leading optical waveguides and said light receiving optical waveguide,

said plurality of light leading optical waveguides are formed to lead a light at a plurality of different positions of said channel, and

said light receiving optical waveguide is formed to receive and output said light passing through said plurality of different positions.

8. The microchip according to claim 7,

wherein said plurality of light leading optical waveguides are formed apart from each other and substantially perpendicular to said channel.

9. The microchip according to claim 7,

wherein said light receiving optical waveguide is formed along said channel.

10. The microchip according to claim 1,

wherein said at least one optical waveguide includes a plurality of optical waveguides,

said plurality of optical waveguides are formed within said clad layer, said plurality of optical waveguides including:

a plurality of light leading optical waveguides;

a plurality of first light receiving optical waveguides as many as said plurality of light leading optical waveguides; and

a second light receiving optical waveguide,

said channel is formed between said plurality of light leading optical waveguides and said plurality of first light receiving optical waveguides,

said plurality of light leading optical waveguides are formed to lead a light at a plurality of different positions of said channel,

each of said plurality of first light receiving optical waveguides is formed to receive said light passing through corresponding one of said plurality of different positions, and

said second light receiving optical waveguide is formed to receive and output said light propagating through each of said plurality of first light receiving optical waveguides.

11. The microchip according to claim 10,

wherein said plurality of light leading optical waveguides are formed apart from each other and substantially perpendicular to said channel, and

said plurality of first light receiving optical waveguides are formed apart from each other and substantially perpendicular to said channel.

12. The microchip according to claim 10,

wherein said second light receiving optical waveguide is formed along said channel.

13. The microchip according to claim 1,

wherein said optical waveguide is formed to share a border with said channel.

14. The microchip according to claim 13,

wherein said optical waveguide includes:

a region having a border with said channel;

a light leading optical waveguide connected to said region and leading a light to said region; and

a light receiving optical waveguide connected to said region, and receiving and outputting said light propagating through said region.

15. The microchip according to claim 13,

wherein said channel includes:

a separation region for separating said sample; and

a detection region connected to said separation region and formed with an angle with respect to said separation region,

wherein said optical waveguide shares a border with said detection region.

16. The microchip according to claim 1,

wherein said optical waveguide has:

a light leading optical waveguide for leading a light to said channel which branches into a first light leading optical waveguide and a second light leading optical waveguide in said clad layer;

a light receiving optical waveguide for receiving said light passing through said channel which branches into a first light receiving optical waveguide and a second light receiving optical waveguide in said clad layer,

wherein said channel is formed to pass through between said first light leading optical waveguide and said first light receiving optical waveguide and between said second light leading optical waveguide and said second light receiving optical waveguide,

a first light led from said first light leading optical waveguide to said channel enters into said first light receiving optical waveguide,

a second light led from said second light leading optical waveguide to said channel enters into said second light receiving optical waveguide, and

said first light and said second light are superposed in said light receiving optical waveguide.

17. The microchip according to claim 1,

wherein said optical waveguide has:

a light leading optical waveguide for leading a light to said channel;

a light receiving optical waveguide for receiving and outputting said light passing through said channel; and

a heating optical waveguide formed upstream of said light leading optical waveguide with respect to said channel,

wherein a boundary surface is formed between said heating optical waveguide and said channel, and

said boundary surface is colored.

18. The microchip according to claim 1, further comprising a near-field probe whose tip reaches within said channel,

wherein said optical waveguide is formed along said channel, and is exposed to said channel at a region facing said tip of said near-field probe.

19. The microchip according to claim 18,

wherein a surface of said optical waveguide is processed to trap molecule in said sample.

20. The microchip according to claim 1,

wherein said optical waveguide includes:

a first optical waveguide along said channel which has a surface exposed to said channel;

a second optical waveguide along said channel which has a surface exposed to said channel,

wherein said channel is formed between said first optical waveguide and said second optical waveguide, and a width of said channel is comparative to molecule in said sample.

21. The microchip according to claim 20,

wherein said width of channel is no more than 50 nm.

22. The microchip according to claim 1,

wherein said optical waveguide is formed to be connectable with an optical fiber at an end section which does not act on said channel optically.

23. The microchip according to claim 22,

wherein said end section of said optical waveguide forms a slope.

24. The microchip according to claim 1,

wherein said channel is a groove formed on said clad layer.

25. A method of manufacturing a microchip comprising:

(a) forming a lower clad layer on a base substrate;

(b) forming at least one groove on said lower clad layer;

(c) forming an optical waveguide in said groove, said optical waveguide having a higher refractive index than said lower clad layer;

(d) forming an upper clad layer over said lower clad layer to cover said optical waveguide, said upper clad layer having a lower refractive index than said optical waveguide; and

(e) forming a channel to act on said optical waveguide optically.

26. The method of manufacturing a microchip according to claim 25,

wherein said channel forming includes forming said channel to intersect with said optical waveguide.

27. The method of manufacturing a microchip according to claim 25,

wherein said channel forming includes forming said channel to divide said optical waveguide.

28. The method of manufacturing a microchip according to claim 25,

wherein said channel forming includes forming said channel to share a border with said optical waveguide.

29. The method of manufacturing a microchip according to claim 25,

wherein said groove forming includes forming an end section of said groove to be a slope.

30. The method of manufacturing a microchip according to claim 25,

wherein said groove forming includes forming a reflective layer on a surface of said groove.

31. The method of manufacturing a microchip according to claim 25,

wherein said upper clad layer forming includes forming said upper clad layer which has a substantially equal refractive index to that of said lower clad layer.

32. A method of detecting compositions by using a microchip including a clad layer having a channel, and a plurality of light leading optical waveguides and a plurality of light receiving optical waveguides which are formed in said clad layer to intersect with said channel, comprising the steps of:

(A) flowing a sample in said channel;

(B) inputting a light to a plurality of positions of said channel almost simultaneously through said plurality of light leading optical waveguides;

(C) said light passing through said sample at said plurality of positions;

(D) receiving through respective of said plurality of light receiving optical waveguides said light passing through said plurality of positions; and

(E) analyzing said sample flowing in said channel based on properties of said received light.

33. The method of detecting compositions according to claim 32,

wherein said analyzing includes analyzing said sample at said plurality of positions almost simultaneously.

34. The method of detecting compositions according to claim 32,

wherein said inputting and said receiving are repeated for a plurality of times at a predetermined interval, and

a speed of travel of said sample along said channel is detected in said analyzing based on said plurality of positions and said predetermined interval.

38. The method of detecting compositions according to claim 34, further comprising:

predicting a timing of collecting said sample based on said speed of travel of said sample.

35. A method of detecting compositions by using a microchip including a clad layer having a channel, a plurality of light leading optical waveguides formed in said clad layer to intersect with said channel, and a light receiving optical waveguide formed along said channel in said clad layer, comprising:

(F) flowing a sample in said channel;

(G) inputting a light to a plurality of positions of said channel sequentially by using said plurality of light leading optical waveguides;

(H) said light passing through said sample at said plurality of positions;

(I) receiving through respective of said plurality of light receiving optical waveguides sequentially said light passing through said plurality of positions; and

(J) analyzing said sample flowing in said channel based on properties of said received light.

36. The method of detecting compositions according to claim 35,

wherein said inputting includes scanning said light at a speed larger than a speed of said sample flowing through said channel.

37. The method of detecting compositions according to claim 35,

wherein said inputting and said receiving are repeated for a plurality of times at a predetermined interval, and

a speed of travel of said sample along said channel is detected in said analyzing based on said plurality of positions and said predetermined interval.

39. A method of detecting compositions by using a microchip including a clad layer having a channel and an optical waveguide formed in said clad layer to share a border with said channel, comprising:

(K) flowing a sample in said channel;

(L) inputting a light from one end of said optical waveguide;

(M) an interaction between an evanescent wave of said light and said sample occurring at a region where said optical waveguide is in contact with said channel;

(N) receiving said light from another end said optical waveguide; and

(O) analyzing said sample flowing in said channel based on properties of said received light.

40. A method of detecting compositions by using a microchip including a clad layer having a channel, a light leading optical waveguide which is formed in said clad layer and branches into a first light leading optical waveguide and a second light leading optical waveguide intersecting with said channel, and a light receiving optical waveguide which is formed in said clad layer and branches into a first light receiving optical waveguide and a second light receiving optical waveguide intersecting with said channel, comprising:

(P) flowing a sample in said channel;

(Q) dividing a light led from said light leading optical waveguide into a first light propagating in said first light leading optical waveguide and a second light propagating in said second light leading optical waveguide;

(R) leading said first light to said channel through said first light leading optical waveguide;

(S) leading said second light to said channel through said second light leading optical waveguide;

(T) receiving said first light passing through said channel by said first light receiving optical waveguide;

(U) receiving said second light passing through said channel by said second light receiving optical waveguide;

(V) superposing said first light and said second light in said light receiving optical waveguide; and

(W) analyzing said sample flowing in said channel based on properties of said superposed light.

41. A method of detecting compositions by using a microchip including a clad layer having a channel, a light leading optical waveguide and a light receiving optical waveguide formed in said clad layer to intersect with said channel, and a heating optical waveguide having a border surface with respect to said channel, in which said heating optical waveguide is formed upstream of said light leading optical waveguide with respect to said channel and said border surface is colored, comprising:

(AA) flowing a sample in said channel;

(BB) leading a heating light to said heating optical waveguide;

(CC) heating said border surface between said heating optical waveguide and said channel by said heating light;

(DD) heating said sample which is in contact with said heated border surface;

(EE) a light led to said light leading optical waveguide passing through said heated sample;

(FF) receiving said light through said light receiving optical waveguide; and

(GG) analyzing said sample flowing in said channel based on properties of said received light.

42. A method of detecting compositions by using a microchip including a clad layer having a channel, an optical waveguide formed in said clad layer along said channel, and a near-field prove whose tip reaches within said channel, in which said optical waveguide is exposed to said channel at a region facing said tip of said near-field probe, comprising:

(HH) flowing a sample in said channel;

(II) leading a light to said near-field probe;

(JJ) generating a near-field adjacent to said tip of said near-field probe;

(KK) generating a scattered light by an interaction between said near-field and said sample;

(LL) receiving said scattered light by said optical waveguide; and

(MM) analyzing said sample flowing in said channel based on properties of said received scattered light.

43. A method of detecting compositions by using a microchip including a clad layer having a channel, and a first optical waveguide and a second optical waveguide which are formed in said clad layer along said channel and have surfaces exposed to said channel, comprising:

(NN) flowing a sample in said channel;

(OO) leading a light to said first optical waveguide;

(PP) generating a near-field adjacent to said surface of said first optical waveguide exposed to said channel;

(QQ) generating a scattered light by an interaction between said near-field and said sample;

(RR) receiving said scattered light by said second optical waveguide; and

(SS) analyzing said sample flowing in said channel based on properties of said received scattered light.