Pressure control method and processing device
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Abstract
First and second pressure sensors 132 and 134 that perform pressure detection over different pressure detection ranges from each other detect the pressure within a process chamber 102 of an etching device 100. A pressure controller 144 selects optimal pressure data in correspondence to the pressure inside the process chamber from the pressure data provided by the first and second pressure sensors 132 and 134. It also analyzes the selected pressure data at a resolution selected in correspondence to the pressure inside the process chamber 102 and thus obtains pressure data achieving a predetermined data density. The pressure controller 134 controls a pressure control valve 130 so as to ensure that the pressure data match preset pressure data.
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Citations
28 Claims
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1-12. -12. (canceled)
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13. A plasma processing device for implementing a plasma processing on a workpiece placed inside a process chamber, comprising:
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means for detecting pressure inside said process chamber, the means for detecting the pressure comprising a plurality of pressure sensors each having a different pressure detection range from one another and connected to said process chamber, each of the sensors configured to generate pressure data, at least two of said pressure sensors having pressure detection ranges overlapping each other;
means for setting a selection value for each of the pressure sensors, the selection value used for selecting which of the pressure data is to be utilized to control the pressure inside the process chamber;
means for selecting the pressure data to be utilized in said pressure control by comparing the pressure data provided by each of the plurality of pressure sensors with the corresponding selection values; and
means for adjusting the pressure inside the process chamber based upon said selected pressure data and preset pressure data corresponding to a preset pressure value.
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14. A plasma processing device comprising:
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means for detecting pressure inside a process chamber, the means for detecting the pressure comprising a plurality of pressure sensors each having a different pressure detection range from one another;
means for adjusting the pressure inside the process chamber based on pressure data detected by the means for detecting the pressure;
means for setting at least two different resolutions for each of the pressure sensors;
means for setting a resolution application range for each of the pressure sensors in correspondence to the pressure detection range of the corresponding pressure sensor;
means for setting a resolution selection value used for selecting one resolution from the at least two resolutions;
means for selecting the one resolution from the at least two resolutions by comparing the pressure data with the resolution selection value;
means for virtually changing the data density of the pressure data at the selected resolution; and
means for controlling the means for adjusting the pressure inside the process chamber based upon the pressure data having the data density changed and preset pressure data corresponding to a preset pressure value.
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15. A pressure control method for use in a controlling pressure inside a process chamber based on pressure data obtained by a plurality of pressure sensors, the pressure sensors each connected to the process chamber and being configured to detect the pressure inside the process chamber, the method comprising:
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setting a pressure detection range for each of the pressure sensors, the pressure detection range for each of the pressure sensors being different from one another, at least two of the pressure detection ranges being overlapping with each other;
setting a selection value for each of the pressure sensors, wherein the selection value is used for selecting the pressure sensor to be used to obtain the pressure data for use in controlling the pressure inside the process chamber;
selecting the pressure data to be used in controlling the pressure inside the process chamber by comparing the pressure data obtained by each of the pressure sensors to the corresponding selection value in each of the pressure sensors; and
adjusting the pressure inside the process chamber based on the selected pressure data and preset pressure data. - View Dependent Claims (16, 17, 18, 19)
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20. A pressure control method for use in a controlling pressure inside a process chamber based on pressure data obtained by a plurality of pressure sensors, the pressure sensors being configured to detect the pressure inside the process chamber and generate pressure data, the method comprising:
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setting at least two resolutions for each of the pressure sensors having a pressure detection range, each of the resolutions having a resolution application range;
setting a resolution selection value to be used to select a single resolution from the at least two resolutions based on the individual resolution application ranges;
selecting the single resolution from the at least two resolutions by comparing the pressure data with the resolution selection value;
virtually changing the data density of the pressure data at the selected resolution; and
adjusting the pressure inside the process chamber based on the pressure data having the data density changed at the selected resolution and preset pressure data corresponding to a preset pressure. - View Dependent Claims (21, 22, 23)
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24. A pressure control method for use in controlling pressure inside a process chamber based on pressure data obtained by a plurality of pressure sensors, the pressure sensors being configured to detect the pressure inside the process chamber and generate pressure data, the method comprising:
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setting a pressure detection range to each of the pressure sensors, the pressure detection ranges of the pressure sensors being different from one another, at least two of the pressure detection ranges being overlapping with each other;
setting a selection value to each of the pressure sensors, wherein the selection value is used for selecting the pressure sensor to be used to obtain the pressure data for use in controlling the pressure inside the process chamber;
setting at least two resolutions for each pressure detection range of the pressure sensors, each of the resolutions having a resolution application;
setting a resolution selection value to be used to select a single resolution from the at least two resolutions based on the individual resolution application ranges;
selecting the pressure data to be used in controlling the pressure inside the process chamber by comparing the pressure data obtained by each of the pressure sensors to the corresponding selection value in each of the pressure sensors; and
selecting the single resolution from the at least two resolutions by comparing the pressure data with the resolution selection value;
virtually changing the data density of the pressure data at the selected resolution; and
adjusting the pressure inside the process chamber based on the pressure data having the data density changed at the selected resolution and preset pressure data corresponding to a preset pressure. - View Dependent Claims (25, 26, 27, 28)
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Specification