Method for dynamic sensor configuration and runtime execution

• US 20050177269A1
• Filed: 12/30/2004
• Published: 08/11/2005
• Est. Priority Date: 07/03/2002
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Funk, Merritt
• Granted Patent: US 7,636,608 B2
• Time in Patent Office: Days
• US Class Current: 700/121
• CPC Class Codes: G05B 19/4187 by tool management
• CPC Class Codes: G05B 2219/31186 TCP-IP internet protocol
• CPC Class Codes: G05B 2219/32128 Gui graphical user interface
• CPC Class Codes: G05B 2219/35504 Multilingual communication, messages in different languages
• CPC Class Codes: G05B 2219/36121 Tree oriented menu, go to root, scroll up down, select mode
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
• CPC Class Codes: Y02P 90/80 Management or planning

Abstract

Graphical User Interfaces (GUIs) are presented for configuring and setting-up dynamic sensors for monitoring tool and process performance in a semiconductor processing system. The semiconductor processing system includes a number of processing tools, a number of processing modules (chambers), and a number of sensors. The graphical display is organized so that all significant parameters are clearly and logically displayed so that the user is able to perform the desired configuration and setup tasks with as little input as possible. The GUI is web-based and is viewable by a user using a web browser.

Claims

1. A method for setting-up a dynamic sensor in a semiconductor processing environment using Graphical User Interfaces (GUIs), the method comprising:

executing a data collection plan;

using the data collection plan to determine a dynamic sensor setup plan;

executing the dynamic sensor setup plan to set up the dynamic sensor.

2. The method as claimed in claim 1, further comprising:

using a plan list GUI screen to determine the data collection plan; and

using a plan GUI screen to determine a selected dynamic sensor instance for the dynamic sensor plan.

3. The method as claimed in claim 2, further comprising:

selecting a dynamic sensor instance from a list of sensor instances on the plan GUI screen; and

adding the selected dynamic sensor instance to the selected instances for this plan list.

4. The method as claimed in claim 2, further comprising:

selecting a dynamic sensor instance from a selected instances for this plan list on the plan GUI screen; and

moving the selected dynamic sensor instance from the selected instances for this plan list to the list of sensors Instances list.

5. The method as claimed in claim 1, further comprising:

selecting the data collection plan using a multi-level navigation tree on a selection GUI screen.

6. The method as claimed in claim 5, wherein the multi-level navigation tree comprises a tool level, a module level, a strategy level, a context level, and a data collection plan level.

7. The method as claimed in claim 6, wherein the strategy level comprises a control strategy level and an analysis strategy level.

8. The method as claimed in claim 5, wherein the selection GUI screen comprises at least one multi-level navigation tree from a group consisting of an English language multi-level navigation tree, a Japanese language multi-level navigation tree, a Taiwanese language screen, a Chinese language multi-level navigation tree, a Korean language multi-level navigation tree, a German language multi-level navigation tree, and a French language multi-level navigation tree.

9. The method as claimed in claim 5, wherein the selection GUI screen comprises a title panel, an information panel, and a control panel.

10. The method as claimed in claim 9, wherein the title panel comprises company logo block to display version information, a user ID block to display the ID of the current user, an alarm message block to display an alarm message when there is an active alarm, a current date and time block to display the current date and time of the server, a current screen name block to display the name of the current screen, a communication status block to display the current status for communications link between server and tool, a tool ID block to display the ID of the tool being monitored, a logoff block to allow a user to log off, and a select screen block to view a list of all available screens.

11. The method as claimed in claim 9, wherein the control panel comprises a tool status button, a module button, a charts button, an alarms button, a SPC button, a control setup button, and a help button.

12. The method as claimed in claim 2, further comprising determining the collection plan using a plan list GUI screen comprising at least one screen from a group consisting of an English language screen, a Japanese language screen, a Taiwanese language screen, a Chinese language screen, a Korean language screen, a German language screen, and a French language screen.

13. The method as claimed in claim 1, wherein the GUI comprises at least one screen containing selection tabs from a group consisting of left-to-right tabs, right-to-left tabs, top-to-bottom tabs, and bottom-to-top tabs.

14. The method as claimed in claim 2, further comprising:

selecting the data collection plan using a selection tab on the plan list GUI screen.

15. The method as claimed in claim 2, further comprising using a sensor setting GUI screen to determine at least one setup parameter for the selected dynamic sensor instance.

16. The method as claimed in claim 15, further comprising:

selecting a dynamic sensor instance on the plan GUI screen;

actuating a portion of the plan GUI screen to activate a sensor setting GUI screen; and

verifying setup items for the selected dynamic sensor instance.

17. The method as claimed in claim 15, further comprising:

selecting a dynamic sensor instance on the plan GUI screen;

actuating a portion of the plan GUI screen to activate a parameter saving screen; and

verifying that the parameter is being saved.

18. The method as claimed in claim 16, further comprising:

selecting a dynamic parameter on the sensor setting GUI screen;

actuating a portion of the sensor setting GUI screen to activate a sensor setup item GUI screen; and

verifying selected items for the selected dynamic parameter.

19. The method as claimed in claim 18, further comprising:

selecting an item from a list of items on the sensor setup item GUI screen; and

adding the selected item to the selected items list for the selected dynamic sensor.

20. The method as claimed in claim 18, further comprising:

selecting an item from a list of selected items for the selected dynamic sensor on the sensor setup item GUI screen; and

removing the selected item from the selected items list for the selected dynamic sensor.

21. The method as claimed in claim 18, further comprising:

selecting a value field from a plurality of value fields for a dynamic parameter on the sensor setup item GUI screen;

modifying the selected value field; and

saving the modified dynamic parameter.

22. The method as claimed in claim 2, further comprising:

activating a parameter saving screen; and

verifying that the correct dynamic parameters are being saved.

23. The method as claimed in claim 2, further comprising:

activating a parameter collection Info screen; and

verifying that a data collection type is correct for a dynamic parameter being saved.

24. The method as claimed in claim 2, further comprising:

activating a formula info screen;

entering a new parameter name; and

creating a new dynamic parameter using a formula that includes at least one value for a setup parameter for the selected sensor instance.

25. The method as claimed in claim 1, further comprising executing a control strategy to determine the data collection plan.

26. The method as claimed in claim 25, further comprising determining the control strategy using process context, the process context being dependent upon at least one of a process being performed, a dynamic sensor instance, a processing module being monitored, and a tool being monitored.