System and method of CVD chamber cleaning
First Claim
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1. A thin-film deposition system comprising:
- a plasma CVD reactor;
a remote plasma chamber arranged outside the plasma CVD reactor, for providing active species to an interior of the plasma CVD; and
an electromagnetic wave generator arranged outside the plasma CVD reactor and the remote plasma chamber, for emitting electromagnetic waves to the interior of the reactor.
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Abstract
A thin-film deposition system includes a plasma CVD reactor; a remote plasma chamber; and an electromagnetic wave generator for emitting electromagnetic waves to an interior of the reactor. Unwanted reaction products adhering to an inner surface of the reactor absorb electromagnetic waves are effectively removed.
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Citations
22 Claims
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1. A thin-film deposition system comprising:
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a plasma CVD reactor;
a remote plasma chamber arranged outside the plasma CVD reactor, for providing active species to an interior of the plasma CVD; and
an electromagnetic wave generator arranged outside the plasma CVD reactor and the remote plasma chamber, for emitting electromagnetic waves to the interior of the reactor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for cleaning a plasma CVD reactor, comprising:
during a cleaning cycle, (i) providing cleaning active species derived from a cleaning gas in the plasma CVD reactor, and (ii) emitting electromagnetic waves, independently of step (i), from an outside of the plasma CVD reactor into an interior of the plasma CVD reactor. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A method for manufacturing multiple substrates having films deposited thereon, comprising the steps of:
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treating multiple substrates using a single-substrate processing plasma CVD reactor; and
initiating a cleaning cycle by (i) providing cleaning active species derived from a cleaning gas in the plasma CVD reactor, and (ii) emitting electromagnetic waves from an outside of the plasma CVD reactor into an interior of the plasma CVD reactor.
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Specification