Image processing device and image processing method

• US 20050178949A1
• Filed: 02/10/2005
• Published: 08/18/2005
• Est. Priority Date: 02/12/2004
• Status: Active Grant

• Current Assignee: Keyence Corporation (Keyence)
• Original Assignee: Keyence Corporation (Keyence)
• Inventors: Saeki, Yasushi
• Granted Patent: US 7,982,779 B2
• Time in Patent Office: Days
• US Class Current: 250/208.100
• CPC Class Codes: G01N 21/9501 Semiconductor wafers manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: G01N 21/956 Inspecting patterns on the surface of objects contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10

Abstract

In an inspection of a substance in which a first region is made of black resin and a second region is made of a metal, a portion surrounding the first region is registered as a first imaging range, and a portion surrounding the second region is registered as a second imaging range. As an imaging condition for the first region, a relatively slow shutter speed is registered such that an image does not become dark. Further, as an imaging condition for the second region, a relatively fast shutter speed is registered such that an image does not have unduly high white levels. As such, the imaging range and condition set by a user are supplied to a CCD camera, and then image processing is performed on a captured image from the CCD camera by an image processing device main body.

Claims

1. An image processing device comprising:

a solid-state image element camera that captures an image of an inspection object;

an image processing device main body that receives and process the captured image from the camera; and

a monitor that displays an inspection or measurement result by the image processing device main body,

the image processing device main body having;

a storing section that stores an imaging range of the solid-state image element camera set by a user;

a transmitting section that reads the imaging range stored in the storing section and transmits a signal about the imaging range to the solid-state image element camera; and

a receiving section that receives a captured image signal of the imaging range from the solid-state image element camera,

wherein the image processing device performs an image process based on the captured image signal received by the receiving section.

2. The image processing device according to claim 1,

wherein the imaging range of the solid-state image element camera is set by an external apparatus connected to the image processing device main body.

3. The image processing device according to claim 2,

wherein the imaging range of the solid-state image element camera is set by the external apparatus during the image process by the image processing device main body.

4. The image processing device according to claim 1,

wherein the storing section further stores an imaging condition set by the user, and

the image processing device main body reads the imaging condition from the storing section, together with the imaging range, transmits signals about the imaging range and the imaging condition to the solid-state image element camera, and sets the imaging condition on the solid-state image element camera to capture an image.

5. The image processing device according to claim 4,

wherein the imaging condition is at least one selected from a group of magnification and scanning modes of the solid-state image element camera, an amplification factor of an output signal of the solid-state image element camera, and a shutter speed, diaphragms and illumination of the solid-state image element camera.

6. The image processing device according to claim 1,

wherein the solid-state image element camera and the image processing device main body are connected to each other via a able.

9. The image processing device according to claim 1,

wherein the image processing device main body has:

an assigning section that assigns the imaging range on behalf of the user;

the transmitting section that transmits the imaging range assigned by the assigning section to the solid-state image element camera;

the receiving section that receives the signal about the captured image of the assigned imaging range from the solid-state image element camera;

a monitor display control section that transmits the captured image received from the solid-state image element camera to the monitor and causes the monitor to display the captured image; and

the storing section that stores the imaging range determined by the user.

10. The image processing device according to claim 4,

wherein the image processing device main body has:

an assigning section that assigns the imaging range and the imaging condition on behalf of the user;

the transmitting section that transmits the imaging range and the imaging condition assigned by the assigning section to the solid-state image element camera;

the receiving section that receives the signal about the captured image of the assigned imaging range captured under the assigned imaging condition from the solid-state image element camera;

a monitor display control section that transmits the captured image received from the solid-state image element camera to the monitor and causes the monitor to display the captured image; and

the storing section that stores the imaging range and imaging condition determined by the user.

7. An image processing device having:

a solid-state image element camera that captures an image of an inspection object;

an image processing device main body that receives and process a captured image from the camera; and

a monitor that displays an inspection or measurement result by the image processing device main body,

wherein the image processing device main body is switchable between a setup mode in which an imaging range is set and an operation mode in which an image process is performed,

in the setup mode, an imaging range assigned by a user is transmitted to the solid-state image element camera, and the captured image transmitted from the solid-state image element camera is displayed on the monitor, such that the user determines the imaging range and the determined imaging range is stored in a storing section, and

in the operation mode, a signal about the imaging range stored in the storing section is transmitted from the image processing device main body to the solid-state image element camera such that the imaging range of the solid-state image element camera is set, and the image processing device main body receives and processes a captured image of the imaging range in an image captured by the solid-state image element camera.

8. The image processing device according to claim 7,

wherein, in the setup mode, an imaging condition is further assigned by the user, together with the imaging range, and an image captured by the solid-state image element camera under the imaging condition assigned by the user is displayed on the monitor, such that the user determines the imaging condition while viewing the monitor and the determined imaging condition is stored in the storing section, and

in the operation mode, signals about the imaging range and the imaging condition stored in the storing section are transmitted from the image processing device main body to the solid-state image element camera such that the imaging range and the imaging condition of the solid-state image element camera are set, and the image processing device main body receives and processes a captured image of the imaging range in an image captured by the solid-state image element camera according to the imaging condition.

11. An image processing method performed in an image processing device, comprising:

storing an imaging range of a solid-state image element camera set by a user;

capturing an image of an inspection object by the solid-state image element camera and generating a captured image signal of the stored imaging range in the image captured by the solid-state image element camera;

performing an image process based on the captured image signal generated.

12. The image processing method according to claim 11, further comprising:

assigning the imaging range on behalf of the user;

capturing an image of an inspection object by the solid-state image element camera and generating a captured image of the assigned imaging range in the image captured by the solid-state image element camera; and

displaying the captured image of the assigned imaging range received from the solid-state image element camera; and

storing the imaging range determined by the user as the set imaging range of the solid-state image element camera.

13. The image processing method according to claim 11, further comprising:

setting the imaging range of the solid-state image element camera by an external apparatus connected to the image processing device.