High performance MEMS scanner
First Claim
1. A MEMS scanner;
- comprising;
a scan plate having longitudinal and lateral dimensions;
a first torsion arm coupled to the scan plate and extending longitudinally from a proximal to a distal location therefrom, the first torsion arm defining an axis of rotation of the scan plate;
a first leverage member coupled to the distal location of the first torsion arm and extending laterally therefrom in opposing directions from an axial location coincident with the first torsion arm to two lateral locations, the lateral locations forming junctions with one or more mounting structures.
1 Assignment
0 Petitions
Accused Products
Abstract
A high performance MEMS scanner is disclosed. In some embodiments, scanner mirror has a wide and short aspect ratio that is similar to rotating polygon facets. Long torsion arms allow large rotation angles including 20° zero-to-peak mechanical and greater. Suspensions couple the scan mirror to torsion arms, reducing dynamic mirror deformation by spreading the torque load. “leverage members” at the distal ends of the torsion arms help reduce stress concentrations. Elimination of a mounting frame increases device yield. Heater leads allow for precise trimming of the scanner resonant frequency. A compressive mount holds mounting pads against mounting structures.
-
Citations
70 Claims
-
1. A MEMS scanner;
- comprising;
a scan plate having longitudinal and lateral dimensions;
a first torsion arm coupled to the scan plate and extending longitudinally from a proximal to a distal location therefrom, the first torsion arm defining an axis of rotation of the scan plate;
a first leverage member coupled to the distal location of the first torsion arm and extending laterally therefrom in opposing directions from an axial location coincident with the first torsion arm to two lateral locations, the lateral locations forming junctions with one or more mounting structures. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
- comprising;
-
27. A MEMS scanner;
- comprising;
a scan plate having a lateral dimension and a longitudinal dimension;
first and second opposed torsion arms, each torsion arm coupled to the scan plate and extending longitudinally from a proximal to a distal location therefrom, the first and second torsion arms defining an axis of rotation of the scan plate; and
first and second opposed mounting structures, each mounting structure coupled to a distal location of a respective torsion arm; and
wherein, each of the first and second torsion arms has a length greater than about four times the longitudinal dimension of the scan plate. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41)
- comprising;
-
42. A MEMS scanner;
- comprising;
a scan plate having a lateral dimension and a longitudinal dimension;
first and second opposed torsion arms, each torsion arm coupled to the scan plate and extending longitudinally from a proximal to a distal location therefrom, the first and second torsion arms defining an axis of rotation of the scan plate; and
first and second opposed mounting structures, each mounting structure coupled to a distal location of a respective torsion arm; and
first and second heater leads coupled to respective first and second opposed mounting structures, the heater leads being operable to pass current through the MEMS scanner to produce joule heating in the MEMS scanner. - View Dependent Claims (43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57)
- comprising;
-
58. A MEMS scanner;
- comprising;
a scan plate having a lateral dimension and a longitudinal dimension;
first and second opposed torsion arms, each torsion arm coupled to the scan plate and extending longitudinally from a proximal to a distal location therefrom, the first and second torsion arms defining an axis of rotation of the scan plate; and
first and second opposed mounting structures, each mounting structure coupled to a distal location of a respective torsion arm; and
at least two clamps, each clamp coupled to compressively hold a respective mounting structure against a respective support structure. - View Dependent Claims (59, 60, 61, 62, 63, 64, 65, 66)
- comprising;
-
67. A MEMS scanner;
- comprising;
a first mounting structure;
a first torsion arm coupled to the first mounting structure;
a scan mirror coupled to the first torsion arm, the scan mirror being operable to rotate to and fro around a scan axis defined by the first torsion arm;
a second torsion arm substantially coaxial with the first torsion arm coupled to the scan mirror; and
a second mounting structure, separate from the first mounting structure, coupled to the second torsion arm. - View Dependent Claims (68, 69, 70)
- comprising;
Specification