Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
First Claim
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1. A spatial light modulator comprising;
- a lower silicon substrate comprising a plurality of circuitry, electrodes and deflectable mirrors;
a glass substrate bonded in spaced apart relationship to the lower substrate;
an intermediate substrate disposed between the upper and lower substrates and having an open area for defining a cavity between the silicon substrate and the glass substrate, with the deflectable mirrors within the gap;
a light blocking material on a lower side of the glass substrate and provided as a rectangular light blocking mask;
wherein the mirrors comprise substantially square mirror plates and hinges that allow the mirror plates to move relative to the upper and lower substrates;
wherein tbe mirrors are formed on the lower silicon substrate in a rectangular array area, and wherein the mirrors have a plurality of mirror edges that are neither parallel nor perpendicular to edges of the rectangular array area;
a RAM cell at each mirror location.
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Abstract
A method for forming a MEMS device is disclosed, where a final release step is performed just prior to a wafer bonding step to protect the MEMS device from contamination, physical contact, or other deleterious external events. Without additional changes to the MEMS structure between release and wafer bonding and singulation, except for an optional stiction treatment, the MEMS device is best protected and overall process flow is improved. The method is applicable to the production of any MEMS device and is particularly beneficial in the making of fragile micromirrors.
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Citations
37 Claims
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1. A spatial light modulator comprising;
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a lower silicon substrate comprising a plurality of circuitry, electrodes and deflectable mirrors;
a glass substrate bonded in spaced apart relationship to the lower substrate;
an intermediate substrate disposed between the upper and lower substrates and having an open area for defining a cavity between the silicon substrate and the glass substrate, with the deflectable mirrors within the gap;
a light blocking material on a lower side of the glass substrate and provided as a rectangular light blocking mask;
wherein the mirrors comprise substantially square mirror plates and hinges that allow the mirror plates to move relative to the upper and lower substrates;
wherein tbe mirrors are formed on the lower silicon substrate in a rectangular array area, and wherein the mirrors have a plurality of mirror edges that are neither parallel nor perpendicular to edges of the rectangular array area;
a RAM cell at each mirror location. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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13. The spatial light modulator of claimn 5, wherein the mirrors comprise hinges that extend parallel to the leading and trailing edges of the active area.
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37. The spatial ligbt modulator of claim 64, wherein the RAM cell is an SRAM cell.
Specification