Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems

• US 20050180008A1
• Filed: 04/15/2005
• Published: 08/18/2005
• Est. Priority Date: 02/27/2003
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Flagello, Donis, Straaijer, Alexander, Cummings, Kevin
• Granted Patent: US 7,221,501 B2
• Time in Patent Office: Days
• US Class Current: 359/487
• CPC Class Codes: G02B 5/3058 comprising electrically conductive elements, e.g. wire grids, conductive particles
• CPC Class Codes: G03F 7/70566 Polarisation control

Abstract

A radial transverse electric polarizer device is provided. The device includes a first layer of material having a first refractive index, a second layer of material having a second refractive index, and a plurality of elongated elements azimuthally and periodically spaced apart, and disposed between the first layer and the second layer. The plurality of elongated elements interact with electromagnetic waves of radiation to transmit transverse electric polarization of electromagnetic waves of radiation. One aspect of the invention is, for example, to use such polarizer device in a lithographic projection apparatus to increase imaging resolution. Another aspect is to provide a device manufacturing method including polarizing a beam of radiation in a transverse electric polarization.

Claims

1. A radial transverse electric polarizer device, comprising:

a substrate material having a first refractive index; and

a plurality of elongated azimuthally oriented elements coupled to the substrate material, the elongated elements having a second refractive index,

wherein the plurality of elements are periodically spaced apart to form a plurality of gaps such that the radial transverse electric polarizer device interacts with an electromagnetic radiation to transmit a first polarization of the electromagnetic radiation.

2. A radial transverse electric polarizer device according to claim 1,

wherein the plurality of elements are periodically spaced apart to form the plurality of gaps such that the radial transverse electric polarizer device interacts with the electromagnetic radiation to reflect a second polarization of the electromagnetic radiation.

3. A radial transverse electric polarizer device according to claim 2,

wherein the first polarization of the electromagnetic radiation is a transverse electric polarization and the second polarization of the electromagnetic radiation is a transverse magnetic polarization.

4. A radial transverse electric polarizer device according to claim 1,

wherein the plurality of elongated elements are formed of an electrically conductive material at a wavelength of the electromagnetic radiation.

5. A radial transverse electric polarizer device according to claim 4,

wherein the electrically conductive material is selected from the group consisting of aluminum, chrome, silver and gold.

6. A radial transverse electric polarizer device according to claim 1,

wherein the substrate material is formed of a dielectric material at a wavelength of the electromagnetic radiation.

7. A radial transverse electric polarizer device according to claim 6,

wherein the dielectric material is selected from the group consisting of quartz, silicon oxide, silicon nitride, gallium arsenide or combinations thereof.

8. A radial transverse electric polarizer device according to claim 1,

wherein the substrate material comprises a dielectric material.

9. A radial transverse electric polarizer device according to claim 1,

wherein a wavelength range of the electromagnetic radiation is in the ultraviolet spectrum.

10. A radial transverse electric polarizer device according to claim 9,

wherein the wavelength range is between 365 nm and 126 nm.

11. A radial transverse electric polarizer device according to claim 9,

wherein the wavelength range is in the extreme ultraviolet.

12. A radial transverse electric polarizer device according to claim 1,

wherein the plurality of elongated elements are concentric.

13. A radial transverse electric polarizer device according to claim 1,

wherein the plurality of elongated azimuthally oriented elements fan out in 360 degrees angles.

14. A radial transverse electric polarizer device according to claim 1,

wherein the first refractive index of the substrate material is different from the second refractive index of the elongated elements.

15. A radial transverse electric polarizer device according to claim 1, further comprising a layer of material disposed on top of the plurality of elongated elements so as to sandwich the elongated element between the substrate material and the layer, the layer of material having a third refractive index.

16. A radial transverse electric polarizer device according to claim 15,

wherein the first refractive index of the substrate material is equal to the third refractive index of the layer of material.

17. A radial transverse electric polarizer device according to claim 15,

wherein the gaps include air.

18. A radial transverse electric polarizer device according to claim 15,

wherein the gaps include a material having a fourth refractive index.

19. A radial transverse electric polarizer device according to claim 15,

wherein the elongated elements are spaced apart with a period selected to polarize the electromagnetic radiation in a transverse electric polarization.

20. A radial transverse electric polarizer device according to claim 15,

wherein the electromagnetic radiation is ultraviolet radiation.

21. A lithographic projection apparatus, comprising:

a radiation system constructed and arranged to provide a projection beam of radiation;

a support structure constructed and arranged to support a patterning device, the patterning device constructed and arranged to pattern the projection beam according to a desired pattern;

a substrate table configured to hold a substrate;

a projection system constructed and arranged to project the patterned beam onto a target portion of the substrate; and

a polarizer device constructed and arranged to polarize the projection beam of radiation in a transverse electric polarization direction, the polarizer device comprising;

a substrate material having a first refractive index; and

a plurality of elongated azimuthally oriented elements coupled to the substrate material, the elongated elements having a second refractive index,

wherein the plurality of elements are periodically spaced apart to form a plurality of gaps such that the radial transverse electric polarizer device interacts with an electromagnetic radiation to transmit a first polarization of the electromagnetic radiation.

22. A lithographic projection apparatus according to claim 21,

wherein the plurality of elements are periodically spaced apart to form the plurality of gaps such that the radial transverse electric polarizer device interacts with the electromagnetic radiation to reflect a second polarization of the electromagnetic radiation.

23. A lithographic projection apparatus according to claim 22,

wherein the first polarization of the electromagnetic radiation is a transverse electric polarization and the second polarization of the electromagnetic radiation is a transverse magnetic polarization.

24. A lithographic projection apparatus according to claim 21,

wherein the plurality of elongated elements are formed of an electrically conductive material at a wavelength of the electromagnetic radiation.

25. A lithographic projection apparatus according to claim 21,

wherein a wavelength range of the electromagnetic radiation is in the ultraviolet spectrum.

26. A lithographic projection apparatus according to claim 21,

wherein the plurality of elongated elements are concentric.

27. A lithographic projection apparatus according to claim 21,

wherein the plurality of elongated azimuthally oriented elements fan out in 360 degrees angles.

28. A lithographic projection apparatus according to claim 21,

wherein the polarizer device further comprises a layer of material disposed on top of the plurality of elongated elements so as to sandwich the elongated element between the substrate material and the layer, the layer of material having a third refractive index.

29. A lithographic projection apparatus according to claim 28,

wherein the first refractive index of the substrate material is equal to the third refractive index of the layer of material.