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Objective with pupil obscuration

  • US 20050180011A1
  • Filed: 04/08/2005
  • Published: 08/18/2005
  • Est. Priority Date: 08/16/2001
  • Status: Active Grant
First Claim
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1. A projection exposure apparatus comprising:

  • an illuminating system to illuminate a drivable micromirror array and an objective, which projects said drivable micromirror array onto photosensitive substrate;

    wherein said objective comprises mirrors which are arranged coaxial with respect to a common optical axis.

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