Interlaced array of piano MEMs micromirrors
First Claim
1. A micro-electro-mechanical device mounted on a substrate comprising:
- an array of first pivoting members pivotally mounted on said substrate about a first lateral axis, each of said first pivoting members including a first and a second supporting region on opposite sides of said first lateral axis;
an array of second pivoting members pivotally mounted on said substrate about a second lateral axis parallel to the first lateral axis, each of said second pivoting members including a first supporting region interleaved with the first supporting regions of the first array of pivoting members between said first and second lateral axes, and a second supporting region on an opposite side of the second lateral axis; and
a first electrode beneath each of the second supporting region for pivoting the first and second pivoting members about the first axis from a rest position.
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Abstract
A micro-electro-mechanical (MEMS) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention the spacing between electrodes is increased without effecting the fill factor of the mirrors by interlacing two sets of tilting platforms, whereby the reflecting portions of both sets of tilting platforms are adjacent one another, while the non-reflecting portions of adjacent platforms are remote from each other.
12 Citations
18 Claims
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1. A micro-electro-mechanical device mounted on a substrate comprising:
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an array of first pivoting members pivotally mounted on said substrate about a first lateral axis, each of said first pivoting members including a first and a second supporting region on opposite sides of said first lateral axis;
an array of second pivoting members pivotally mounted on said substrate about a second lateral axis parallel to the first lateral axis, each of said second pivoting members including a first supporting region interleaved with the first supporting regions of the first array of pivoting members between said first and second lateral axes, and a second supporting region on an opposite side of the second lateral axis; and
a first electrode beneath each of the second supporting region for pivoting the first and second pivoting members about the first axis from a rest position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification