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Surface waveguide and method of manufacture

  • US 20050180713A1
  • Filed: 01/12/2005
  • Published: 08/18/2005
  • Est. Priority Date: 01/13/2004
  • Status: Active Grant
First Claim
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1. A method comprising forming a first conformal layer of a first material in a first recess within a first layer, wherein:

  • said first conformal layer substantially fills said first recess;

    said first material is characterized by a first critical thickness; and

    a width of said first recess is no greater than twice said first critical thickness.

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